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BROWSE VOLUMES

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Volume 3

Issue 6 | Nov | pp. 319-361

Issue 5 | Sep | pp. 239-317

Issue 4 | Jul | pp. 173-235

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Issue 1 | Jan | pp. 1-30

1965

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X-Ray Diffraction Study of Vacuum-Evaporated Silver Films

T. B. Light and C. N. J. Wagner

J. Vac. Sci. Technol. 3, 1 (1966); http://dx.doi.org/10.1116/1.1492444 (5 pages) | Cited 10 times

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Silver films were prepared by evaporation onto glass substrates held near 130 °C at different residual gas pressures (10⁻⁴ to 10⁻⁷Torr). Powder-pattern peaks of these films (thicknesses 2000 Å and 6000 Å) were measured with Cu Kα radiation at room temperature, and the profiles subjected to a Fourier analysis to determine particle size, strains, and faulting. Films prepared in poorer vacuum (10⁻⁴–10⁻⁶Torr) show small particle sizes (∼500Å), very small root-mean-squared strains (∼0.0005) and evidence for deformation stacking faults and micro-twinning. Lattice parameter measurements indicate the presence of internal strains in films heated to 250 °C for 2 h and measured at room temperature.

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68.55.-a	Thin film structure and morphology
68.60.Bs	Mechanical and acoustical properties
81.15.-z	Methods of deposition of films and coatings; film growth and epitaxy
61.05.cm	X-ray reflectometry (surfaces, interfaces, films)

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Reemission of Ionically Pumped H₂ and He from a Stainless Steel Surface

G. Martin and G. Lewin

J. Vac. Sci. Technol. 3, 6 (1966); http://dx.doi.org/10.1116/1.1492445 (5 pages) | Cited 3 times

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H₂ and He discharges in a stellarator produce copious wall bombardment by the plasma ions. The reemission rate of the gas was measured for times of 0.06 to 10⁵ see after bombardment. The rate was approximately proportional to t^−0.6 for He and t^−0.75 for H₂. The reemission is also calculated assuming diffusion of the gas in the solid and taking into account the finite nonuniform initial distribution. It follows from the analysis that the rate is proportional to t⁻ⁿ where n approaches 0.5 or 1.5 as the ratio of reemission to bombarding time approaches zero or infinity.

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52.40.Hf	Plasma-material interactions; boundary layer effects
34.35.+a	Interactions of atoms and molecules with surfaces
52.55.Jd	Magnetic mirrors, gas dynamic traps

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Interaction of Gases with a Condensed Phase

J. S. Yu and S. L. Soo

J. Vac. Sci. Technol. 3, 11 (1966); http://dx.doi.org/10.1116/1.1492446 (9 pages)

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By use of a classical model, the phenomenon of trapping of a gas particle at the surface of a cold solid is investigated. The equation of motion is solved by the adoption of a semirepulsive potential of interaction and the equations determining the critical kinetic energy for trapping which is essential for the evaluation of the capture coefficient are obtained. These equations are simplified for the case that a gas particle collides on its own crystalline phase on account of the long “regression time” and the critical kinetic energy is thereby obtained. The regression time is the total time during which an initially free gas particle becomes trapped by the crystal surface before it is reevaporated again. It is long as compared to the period of lattice vibration.

The cryopumping of condensable nonpolar gases is investigated. The existence of an adsorbed, mobile phase is taken into account in the derivation. The capture coefficients obtained for N₂ and CO₂ based on the geometric area of the cryosurface are quite satisfactory as compared with those derived from experimental data. Pressures as functions of flow rates were measured for CO₂ at a cryosurface temperature of 77.4 °K. The results are in good agreement with that calculated from the present simple theory.

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68.55.-a	Thin film structure and morphology
68.60.Bs	Mechanical and acoustical properties
81.15.-z	Methods of deposition of films and coatings; film growth and epitaxy
61.05.cm	X-ray reflectometry (surfaces, interfaces, films)

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Simple Differential Pumping Stage for Connecting High to Ultrahigh-Vacuum Systems

E. V. Kornelsen and B. Domeij

J. Vac. Sci. Technol. 3, 20 (1966); http://dx.doi.org/10.1116/1.1492447 (5 pages) | Cited 2 times

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Measurements have been made of the nitrogen pressure ratio across a connecting stage as a function of the nitrogen exposure on the high-pressure side. The stage consisted of a titanium evaporator in a spherical glass bulb (8-cm diameter) which was connected to two glass ultra-high vacuum systems via short axially aligned tubes. When an unobstructed straight line path was allowed between the two systems, at least 99% of the transmitted gas was the direct “streaming” component which did not encounter the titanium surface. For the particular design reported here, the resulting pressure ratio was 3.3×10⁴. When the streaming path was obstructed, pressure ratios as high as 3×10⁷ were measured. Saturation of the chemisorption on the evaporated titanium occurred at ∼8×10¹⁴ molecules per cm² of macroscopic area. A single evaporator containing 0.12 g of titanium was able to deposit more than 300 films. Expressions are given from which the performance of other stages of similar design but of different dimensions can be estimated.

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07.30.Cy

Vacuum pumps