Sculptured thin films and glancing angle deposition: Growth mechanics and applications

Robbie, K.; Brett, M. J.

doi:doi:10.1116/1.580562

Volume/Page
Keyword
DOI
Citation
Advanced

Volume: Page/Article:

Search Content Type

article doi:

Citation:

You are not logged in to this journal. Log In

Journal of Vacuum Science & Technology A / Volume 15 / Issue 3

Previous Article | Next Article

J. Vac. Sci. Technol. A 15, 1460 (1997); http://dx.doi.org/10.1116/1.580562 (6 pages)

Sculptured thin films and glancing angle deposition: Growth mechanics and applications

K. Robbie and M. J. Brett

Department of Electrical Engineering and Alberta Microelectronic Centre, University of Alberta, Edmonton, Alberta T6G 2G7, Canada

Abstract

Citing Articles (163)

Alerts
- Alert Me When Cited
- Alert Me When Corrected
Tools
Share
- Email Abstract
- Connotea
- CiteULike
- del.icio.us
- BibSonomy
- Tweet this Article
- Add to Facebook

Full Text: Download PDF | Rent Article | Buy PDF (US$28) | View Cart

Sculptured thin films with three dimensional microstructure controlled on the 10 nm scale were fabricated with an evaporation technique. Glancing angle deposition (GLAD) and substrate motion were employed to “sculpt” columnar thin film microstructure into desired forms ranging from zigzag shaped to helical to four-sided “square” helical. Computer control of substrate motion was used to accurately position the substrate and to achieve the desired film structures. The growth mechanics of this novel thin film deposition technique are investigated with density measurements, scanning electron microscopy analysis, and measurements of effective refractive index. Adatom diffusion and atomic shadowing are the dominant growth mechanisms with glancing angle deposition conditions creating extreme shadowing. With controlled rotation of the substrate about two axes during deposition, a dense capping layer can be produced on top of the porous sculptured films. The success of the capping process was found to be strongly dependent on the technique used, with an exponential decrease(θ∝[1−A⋅e^B⋅t]) with time of incident flux angle found to be the best to reduce filling of the porous film and fracturing of the capping film. The GLAD technique was found to have potentially promising application in optical, biological, and chemical devices and materials. © 1997 American Vacuum Society.

View more related articles.

KEYWORDS and PACS

Keywords

thin films, porous materials, crystal microstructure, scanning electron microscopy, density, vapour deposition, refractive index

PACS

81.05.Rm

Porous materials; granular materials
68.55.-a

Thin film structure and morphology
81.15.-z

Methods of deposition of films and coatings; film growth and epitaxy
78.20.Ci

Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)
78.66.-w

Optical properties of specific thin films