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Sep 2004

Volume 22, Issue 5, pp. L7-2215

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Pressure-measurement errors in a cold-cathode-ionization gauge caused by an external-electron source

Hiroshi Saeki, Tamotsu Magome, Yoshihiko Shoji, and Takashi Momose

J. Vac. Sci. Technol. A 22, 2212 (2004); http://dx.doi.org/10.1116/1.1781184 (4 pages) | Cited 2 times

Online Publication Date: 24 September 2004

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Abstract Unavailable
Show PACS
07.30.Dz Vacuum gauges
06.20.Dk Measurement and error theory
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