Glancing angle deposition: Fabrication, properties, and applications of micro- and nanostructured thin films

Hawkeye, Matthew M.; Brett, Michael J.

doi:doi:10.1116/1.2764082

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Journal of Vacuum Science & Technology A / Volume 25 / Issue 5 / Review Article

J. Vac. Sci. Technol. A 25, 1317 (2007); http://dx.doi.org/10.1116/1.2764082 (19 pages)

Glancing angle deposition: Fabrication, properties, and applications of micro- and nanostructured thin films

Matthew M. Hawkeye¹ and Michael J. Brett²

¹Department of Electrical and Computer Engineering, University of Alberta, Edmonton, Alberta T6G 2V4, Canada
²Department of Electrical and Computer Engineering, University of Alberta, Edmonton, Alberta T6G 2V4, Canada and National Institute for Nanotechnology, National Research Council of Canada, Edmonton, Alberta T6G 2M9, Canada

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(Published online 30 July 2007)

Abstract

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Physical vapor deposition under conditions of obliquely incident flux and limited adatom diffusion results in a film with a columnar microstructure. These columns will be oriented toward the vapor source and substrate rotation can be used to sculpt the columns into various morphologies. This is the basis for glancing angle deposition (GLAD), a technique for fabricating porous thin films with engineered structures. The origin of the columnar structure characteristic of GLAD films is discussed in terms of nucleation processes and structure zone models. As deposition continues, the columnar structures are influenced by atomic-scale ballistic shadowing and surface diffusion. Competitive growth is observed where the tallest columns grow at the expense of smaller features. The column shape evolves during growth, and power-law scaling behavior is observed as shown in both experimental results and theoretical simulations. Due to the porous nature of the films and the increased surface area, a variety of chemical applications and sensor device architectures are possible. Because the GLAD process provides precise nanoscale control over the film structure, characteristics such as the mechanical, magnetic, and optical properties of the deposited film may be engineered for various applications. Depositing onto prepatterned substrates forces the columns to adopt a planar ordering, an important requirement for photonic crystal applications.

ACKNOWLEDGMENTS

The authors would like to thank the Natural Sciences and Engineering Research Council of Canada (NSERC), the Alberta Informatics Circle of Research Excellence (iCORE), Micralyne Inc., and Alberta Ingenuity for financial support.

Article Outline

INTRODUCTION
COLUMN FORMATION
1. Nucleation and initial growth
2. Column formation and film microstructure: Structure zone models
COLUMN GROWTH AT NON-NORMAL INCIDENCES
1. Ballistic shadowing
2. Diffusion and surface temperature
3. Column evolution
4. Deposition onto nonplanar substrates
5. Controlling column morphology
6. Simulating column growth
7. Atypical behavior
FILM PROPERTIES AND TECHNOLOGICAL APPLICATIONS
1. Surface area enhancement and applications
2. Mechanical properties
3. Magnetic anisotropy
4. Optical properties of structured films
  1. Columnar thin films and birefringence
  2. Helical columns and chiral optics
  3. Optical coatings and photonic crystals
SUMMARY

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KEYWORDS and PACS

Keywords

crystal microstructure, nanotechnology, vapour deposition

PACS

81.16.-c

Methods of micro- and nanofabrication and processing
68.55.A-

Nucleation and growth
81.10.Bk

Growth from vapor
81.15.-z

Methods of deposition of films and coatings; film growth and epitaxy

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History

Received 21 June 2007
Accepted 27 June 2007
Published online 30 July 2007

Digital Object Identifier

http://dx.doi.org/10.1116/1.2764082

PUBLICATION DATA

ISSN

0734-2101 (print)

Publisher

American Institute of Physics

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