Fabrication of metal-based high-aspect-ratio microscale structures by compression molding

Jiang, J.; Mei, Fanghua; Meng, W. J.

doi:doi:10.1116/1.2912078

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Journal of Vacuum Science & Technology A / Volume 26 / Issue 4 / PAPERS FROM THE 54TH INTERNATIONAL SYMPOSIUM OF AVS / MEMS and NEMS

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J. Vac. Sci. Technol. A 26, 745 (2008); http://dx.doi.org/10.1116/1.2912078 (7 pages)

Fabrication of metal-based high-aspect-ratio microscale structures by compression molding

J. Jiang, Fanghua Mei, and W. J. Meng

Department of Mechanical Engineering, Louisiana State University, Baton Rouge, Louisiana 70803

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(Published online 30 June 2008)

Abstract

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Metal-based high-aspect-ratio microscale structures (HARMSs) are basic building blocks for metallic microdevices such as microelectromagnetic relays and microchannel heat exchangers. Metallic microdevices may have advantages over Si-based devices when subjected to high stresses, high temperatures, and other harsh conditions. In this article, the authors summarize our recent results on molding replication of metal-based HARMS. The micromolding response was experimentally measured in Al and Cu, and rationalized with companion high-temperature tensile testing and finite element analysis. Successful replication of Ni-based and NiTi-based HARMS was demonstrated.

ACKNOWLEDGMENTS

The authors gratefully acknowledge partial project support from NSF through Grant Nos. DMI-0400061 and DMI-0556100.

Article Outline

INTRODUCTION
EXPERIMENTAL PROCEDURES
RESULTS AND DISCUSSION
SUMMARY

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KEYWORDS and PACS

Keywords

compression moulding, crystal microstructure, finite element analysis, nickel compounds, replica techniques, tensile testing, Al, Cu, Ni, NiTi

PACS

81.70.Bt

Mechanical testing, impact tests, static and dynamic loads
61.72.Hh

Indirect evidence of dislocations and other defects (resistivity, slip, creep, strains, internal friction, EPR, NMR, etc.)
81.10.Fq

Growth from melts; zone melting and refining

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History

Received 10 October 2007
Accepted 24 March 2008
Published online 30 June 2008

Digital Object Identifier

http://dx.doi.org/10.1116/1.2912078

PUBLICATION DATA

ISSN

0734-2101 (print)

1520-8559 (online)

Publisher

American Vacuum Society

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