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Sep 2008

Volume 26, Issue 5, pp. 1101-1363

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Bayard-Alpert ionization gauge sensitivity for C7F14

S.-H. Kim, J. R. Heinrich, M. J. Miller, and R. L. Merlino

J. Vac. Sci. Technol. A 26, 1355 (2008); http://dx.doi.org/10.1116/1.2952455 (2 pages) | Cited 1 time

Online Publication Date: 28 August 2008

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Various empirical methods are applied to estimate the Bayard-Alpert ionization gauge relative sensitivity for C7F14. These values are compared to a measured value obtained by calibrating the ion gauge tube pressure sensor against a capacitance manometer.
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07.30.Dz Vacuum gauges

Investigation of a vapor deposited thin silica film as a novel substrate for in situ Fourier transform infrared spectroscopy

A. Anderson and W. Robert Ashurst

J. Vac. Sci. Technol. A 26, 1357 (2008); http://dx.doi.org/10.1116/1.2956630 (5 pages)

Online Publication Date: 28 August 2008

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Abstract Unavailable
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78.66.Nk Insulators
78.30.Hv Other nonmetallic inorganics

Comment on “CrNx and Cr1−xAlxN as template films for the growth of α-alumina using ac reactive magnetron sputtering,” [ J. Vac. Sci. Technol. A 25, 1367 (2007) ]

Atul Khanna

J. Vac. Sci. Technol. A 26, 1362 (2008); http://dx.doi.org/10.1116/1.2969902 (2 pages)

Online Publication Date: 28 August 2008

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Abstract Unavailable
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81.15.Cd Deposition by sputtering
68.55.aj Insulators
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