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Journal of Vacuum Science & Technology A / Volume 27 / Issue 2 / Articles

J. Vac. Sci. Technol. A 27, 306 (2009); http://dx.doi.org/10.1116/1.3081968 (9 pages)

Hydrogen mediated transport of Sn to Ru film surface

Nadir Faradzhev1 and Vadim Sidorkin2

1Physics Department, Rutgers University, 136 Frelinghuysen Road, Piscataway, New Jersey 08854
2Faculty of Applied Sciences, TU Delft, Lorentzweg 1, 2628 CJ Delft, The Netherlands

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(Published online 19 February 2009)

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The authors report on the interaction of atomic hydrogen with Sn and thin Ru film at room temperature. The study is done using a combination of photoelectron and low energy ion scattering spectroscopies as well as scanning electron microscopy. The adsorption of hydrogen on a Sn surface leads to the formation of stannane (SnH4), which dissociatively adsorbs on the surface of polycrystalline Ru film. In the range of effective Sn coverages studied (up to 1 ML), the resulting overlayer consists of randomly distributed three-dimensional islands with average size below 40 nm occupying up to several percent of the surface area. Nucleation of Sn is observed presumably at defect sites (e.g., grain boundaries). Ion scattering data are found consistent with Volmer–Weber growth mode: no initial transition wetting layer formation is detected. Oxidation of Sn islands on a Ru surface at room temperature results in the formation of SnO. Neither metallic nor oxidation states of Sn higher than Sn2+ are observed by photoelectron spectroscopy.

© 2009 American Vacuum Society

ACKNOWLEDGMENTS

The authors are grateful to Professor T. E. Madey (Physics Department, Rutgers University, Piscataway, NJ) and Professor P. C. Zalm (MiPlaza, Philips Research Europe, The Netherlands) for the helpful discussions, and to Dr. Sergij Yulin (Fraunhofer Institut Angewandte Optik und Feinmechanik, Jena, Germany) for the ruthenium thin film samples prepared for our experiments.

Article Outline

  1. INTRODUCTION
  2. EXPERIMENT
  3. RESULTS
    1. Exposure of Ru film to ⋅H in the presence of Sn
    2. Distribution of Sn across the surface
    3. Effect of ⋅H on the Sn source
    4. Surface occupation
    5. Surface morphology
    6. Air exposure
    7. Stability of Sn on Ru
  4. DISCUSSION
    1. Morphology of Ru film
    2. Adsorption of ⋅H on Ru
    3. Reaction of ⋅H with Sn
    4. Formation of Sn islands
    5. Oxidation of Sn/Ru film and reduction of surface oxides
  5. CONCLUSION

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KEYWORDS and PACS

Keywords

adsorption, grain boundaries, hydrogen, ion-surface impact, nucleation, oxidation, photoelectron spectra, ruthenium, scanning electron microscopy, thin films, tin, tin compounds, wetting, ruthenium, tin, atomic hydrogen, tin tetrahydride, tin oxide, ruthenium oxide

PACS

  • 68.43.-h

    Chemisorption/physisorption: adsorbates on surfaces

  • 79.60.-i

    Photoemission and photoelectron spectra

  • 61.72.Mm

    Grain and twin boundaries

  • 81.65.Mq

    Oxidation

  • 79.20.Rf

    Atomic, molecular, and ion beam impact and interactions with surfaces

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History
Received 21 October 2008
Accepted 20 January 2009
Published online 19 February 2009
Digital Object Identifier
http://dx.doi.org/10.1116/1.3081968

PUBLICATION DATA

ISSN

0734-2101 (print)  
1520-8559 (online)

Publisher

American Vacuum Society

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