Status and potential of atmospheric plasma processing of materials

Pappas, Daphne

doi:doi:10.1116/1.3559547

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Journal of Vacuum Science & Technology A / Volume 29 / Issue 2 / Review Article

J. Vac. Sci. Technol. A 29, 020801 (2011); http://dx.doi.org/10.1116/1.3559547 (17 pages)

Status and potential of atmospheric plasma processing of materials

Daphne Pappas

United States Army Research Laboratory, Aberdeen Proving Ground, Maryland 21005

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(Published online 4 March 2011)

Abstract

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This paper is a review of the current status and potential of atmospheric plasma technology for materials processing. The main focus is the recent developments in the area of dielectric barrier discharges with emphasis in the functionalization of polymers, deposition of organic and inorganic coatings, and plasma processing of biomaterials. A brief overview of both the equipment being used and the physicochemical reactions occurring in the gas phase is also presented. Atmospheric plasma technology offers major industrial, economic, and environmental advantages over other conventional processing methods. At the same time there is also tremendous potential for future research and applications involving both the industrial and academic world.

ACKNOWLEDGMENTS

The author would like to express her heartfelt gratitude to all the people who helped perform the studies on atmospheric plasma processing of materials. She particularly wishes to thank the scientists and engineers at the Army Research Laboratory, Drexel University and University of Bari that have contributed to this work through helpful discussions.

Article Outline

INTRODUCTION
1. Low pressure plasma technology
2. History of discharges operating under atmospheric pressure
3. Atmospheric plasma technology after the 1990s
EQUIPMENT
1. Reactor design
2. Power supplies and dielectric materials
3. Gas options and flow rates
4. Design optimization of DBD systems
5. Other experimental setups operating under atmospheric-pressure conditions
ROLE OF ENERGETIC SPECIES IN ATMOSPHERIC-PRESSURE PLASMAS—GAS PHASE CHARACTERIZATION
SURFACE MODIFICATION OF POLYMERS IN DIELECTRIC BARRIER DISCHARGES UNDER ATMOSPHERIC PRESSURE
1. Hydrophilic and hydrophobic surfaces
2. Surface characterization of polymers treated under DBDs
3. Studies of the surface morphology after plasma treatment
PLASMA ASSISTED DEPOSITION OF ORGANIC AND INORGANIC COATINGS
DIELECTRIC BARRIER DISCHARGES FOR THE TREATMENT OF BIOMATERIALS
1. Inactivation of biological agents
2. Functionalization and surface patterning using atmospheric plasmas
DIELECTRIC BARRIER DISCHARGES FOR POLLUTION AND WASTE CONTROL
CONCLUSION

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KEYWORDS and PACS

Keywords

air pollution control, biological techniques, biomedical materials, contact angle, discharges (electric), hydrophilicity, hydrophobicity, plasma chemistry, plasma CVD, polymer films, reviews, scanning electron microscopy, surface energy, surface morphology, surface treatment, wetting

PACS

52.77.Dq

Plasma-based ion implantation and deposition
81.15.Gh

Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)
81.65.-b

Surface treatments
82.33.Xj

Plasma reactions (including flowing afterglow and electric discharges)
87.85.J-

Biomaterials
01.30.Rr

Surveys and tutorial papers; resource letters

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History

Received 4 February 2011
Accepted 4 February 2011
Published online 4 March 2011

Digital Object Identifier

http://dx.doi.org/10.1116/1.3559547

PUBLICATION DATA

ISSN

0734-2101 (print)

1520-8559 (online)

Publisher

American Vacuum Society

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