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Journal of Vacuum Science & Technology A / Volume 29 / Issue 2 / Articles

J. Vac. Sci. Technol. A 29, 021001 (2011); http://dx.doi.org/10.1116/1.3543636 (4 pages)

Physical vapor deposition and patterning of calcium fluoride films

L. Piñol, K. Rebello, K. Caruso, A. S. Francomacaro, and G. L. Coles

Applied Physics Laboratory, Johns Hopkins University, Laurel, Maryland 20723

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(Published online 14 January 2011)

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Physical vapor deposition of calcium fluoride (CaF2) thin films was performed via electron beam evaporation, resistive/thermal evaporation, and nonreactive radio frequency sputtering. Patterning of the resultant “usable” thin films was then also attempted in several ways, including by shadow mask deposition, liftoff, and direct chemical etching. Resistive evaporation produced the most stable films, having polycrystalline morphology with a moderately strong preference to the 331 orientation. The cleanest patterning results were obtained via a polymer/metal liftoff. The results and implications of each of the various deposition and patterning techniques are discussed.

© 2011 American Vacuum Society

Article Outline

  1. INTRODUCTION
  2. EXPERIMENT
    1. Deposition
      1. Sputtering
      2. Electron-beam evaporation
      3. Resistive evaporation
  3. PATTERNING
    1. Wet chemical etch
    2. Shadowmask
    3. Liftoff
  4. CONCLUSIONS

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KEYWORDS and PACS

Keywords

calcium compounds, chemical vapour deposition, crystal morphology, crystal orientation, electron beam deposition, evaporation, nanopatterning, sputter deposition, sputter etching, thin films, calcium fluoride, calcium, fluoride

PACS

  • 68.55.A-

    Nucleation and growth

  • 81.15.Gh

    Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)

  • 81.16.Rf

    Micro- and nanoscale pattern formation

  • 81.15.Jj

    Ion and electron beam-assisted deposition; ion plating

  • 81.15.Cd

    Deposition by sputtering

  • 68.55.J-

    Morphology of films

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History
Received 21 June 2010
Accepted 20 December 2010
Published online 14 January 2011
Digital Object Identifier
http://dx.doi.org/10.1116/1.3543636

PUBLICATION DATA

ISSN

0734-2101 (print)  
1520-8559 (online)

Publisher

American Vacuum Society

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