Flexible ZnSnO3/Ag/ZnSnO3 multilayer electrodes grown by roll-to-roll sputtering on flexible polyethersulfone substrates

Choi, Yoon-Young; Kim, Han-Ki; Koo, Hyun-Woo; Kim, Tae-Woong; Lee, Sung-Nam

doi:doi:10.1116/1.3632999

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Journal of Vacuum Science & Technology A / Volume 29 / Issue 6 / Thin Films

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J. Vac. Sci. Technol. A 29, 061502 (2011); http://dx.doi.org/10.1116/1.3632999 (7 pages)

Flexible ZnSnO₃/Ag/ZnSnO₃ multilayer electrodes grown by roll-to-roll sputtering on flexible polyethersulfone substrates

Yoon-Young Choi¹, Han-Ki Kim¹, Hyun-Woo Koo², Tae-Woong Kim², and Sung-Nam Lee³

¹Department of Advanced Materials Engineering for Information and Electronics, Kyung-Hee University, 1 Seocheon-dong, Yongin-si, Gyeonggi-do 446-701, South Korea
²OLED Research Institute, Samsung Mobile Display Co. LTD., San #24, Nongseo-Dong, Giheung-Gu, Yongin-City, Gyeonggi-Do, 446-711, Korea
³Department of Nano-Optical Engineering, Korea Polytechnique University, Siheung 429-793, South Korea

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(Published online 12 September 2011)

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The authors report on the characteristics of flexible ZnSnO₃ (ZTO)/Ag/ZTO multilayer electrodes sputtered on a flexible polyethersulfone substrate using roll-to-roll sputtering at room temperature. The sheet resistance and optical transmittance of the flexible ZTO/Ag/ZTO multilayer were mainly affected by the thickness and morphology of the Ag layer inserted between the ZTO layers. Dependence of photoluminescence peak intensity on the Ag thickness indicates that the high transmittance of the flexible ZTO/Ag/ZTO electrode can be explained by surface plasmon resonance as well as antireflection effects. At the optimized Ag thickness (10 nm), the flexible ZTO/Ag/ZTO exhibited a resistivity of 4.15 × 10⁻⁵ Ω-cm, an optical transmittance of 86.03%, and a figure of merit value of 42.83 × 10⁻³ Ω⁻¹ comparable to those of conventional crystalline ITO electrodes. In addition, the optimized ZTO/Ag/ZTO sample showed constant resistance change (ΔR/R) during repeated bending cycles, indicating the robustness of the ZTO/Ag/ZTO electrode as a flexible electrode for cost efficient-flexible displays and photovoltaics.

ACKNOWLEDGMENTS

This work was mainly supported by the Samsung Mobile Displays Research Center Program and was partially supported by a grant from the Gyeonggi-do International Collaborative Research Program.

Article Outline

INTRODUCTION
EXPERIMENT
RESULTS AND DISCUSSION
CONCLUSIONS

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KEYWORDS and PACS

Keywords

electrical resistivity, electrochemical electrodes, multilayers, photoluminescence, silver, sputter deposition, surface plasmon resonance, zinc compounds

PACS

73.40.-c

Electronic transport in interface structures
78.55.Hx

Other solid inorganic materials
81.15.Cd

Deposition by sputtering
73.20.Mf

Collective excitations (including excitons, polarons, plasmons and other charge-density excitations)

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History

Received 30 March 2011
Accepted 27 July 2011
Published online 12 September 2011

Digital Object Identifier

http://dx.doi.org/10.1116/1.3632999

PUBLICATION DATA

ISSN

0734-2101 (print)

1520-8559 (online)

Publisher

American Vacuum Society

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Flexible ZnSnO₃/Ag/ZnSnO₃ multilayer electrodes grown by roll-to-roll sputtering on flexible polyethersulfone substrates