• Volume/Page
  • Keyword
  • DOI
  • Citation
  • Advanced
   
 
 
 

You are not logged in You are not logged in to this journal. Log In

J. Vac. Sci. Technol. A 30, 010801 (2012); http://dx.doi.org/10.1116/1.3660699 (10 pages)

Atomic layer deposition for nanostructured Li-ion batteries

H. C. M. Knoops1, M. E. Donders2, M. C. M. van de Sanden1, P. H. L. Notten1, and W. M. M. Kessels1

1Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands
2Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands and Materials innovation institute M2i, P.O. Box 5008, 2600 GA Delft, The Netherlands

View MapView Map

(Published online 21 November 2011)

Full Text: Read Online (HTML) | Download PDF | Rent Article | Buy PDF (US$28) | View Cart
Nanostructuring is targeted as a solution to achieve the improvements required for implementing Li-ion batteries in a wide range of applications. These applications range in size from electrical vehicles down to microsystems. Atomic layer deposition (ALD) could be an enabling technology for nanostructured Li-ion batteries as it is capable of depositing ultrathin films (1–100 nm) in complex structures with precise growth control. The potential of ALD is reviewed for three battery concepts that can be distinguished, i.e., particle-based electrodes, 3D-structured electrodes, and 3D all-solid-state microbatteries. It is discussed that a large range of materials can be deposited by ALD and recent demonstrations of battery improvements by ALD are used to exemplify its large potential.

© 2012 American Vacuum Society

ACKNOWLEDGMENT

This work was sponsored by the Materials innovation institute M2i under Project No. MC3.06278.

Article Outline

  1. INTRODUCTION
  2. LI-ION BATTERIES
  3. CONCEPTS FOR NANOSTRUCTURED LI-ION BATTERIES
    1. Particle-based electrodes
    2. 3D-structured electrodes
    3. 3D all-solid-state microbatteries
  4. ALD FOR BATTERY MATERIALS
  5. APPLICATION AND IMPLEMENTATION
    1. Particle-based electrodes
    2. 3D-structured electrodes
    3. 3D all-solid-state microbatteries
  6. CONCLUSION

KEYWORDS and PACS

PACS

RELATED DATABASES

To view database links for this article, you need to log in.

PUBLICATION DATA

ISSN

0734-2101 (print)  
1520-8559 (online)

For access to fully linked references, you need to log in.

Figures (7) Tables (1)

Access to article objects (figures, tables, multimedia) requires a subscription; log in to view available files.
(Access to supplementary files, where available, is free for this journal.)

Access to article objects (figures, tables, multimedia) requires a subscription; log in to view available files.
(Access to supplementary files, where available, is free for this journal.)


Close

close