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Journal of Vacuum Science & Technology A / Volume 30 / Issue 2 / Letters

J. Vac. Sci. Technol. A 30, 020601 (2012); http://dx.doi.org/10.1116/1.3677387 (4 pages)

Novel light sputter ion pump with neodymium iron boron magnets and the low outgassing body

Taekyun Ha1, C. D. Park1, and Sukmin Chung2

1Pohang Accelerator Laboratory, POSTECH, Pohang 790-784, South Korea
2Department of Physics, POSTECH, Pohang 790-784, South Korea

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(Published online 17 January 2012)

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A light sputter ion pump for ultra high vacuum was fabricated using 5-mm-thick neodymium iron boron (NdFeB) magnets. The weight of the pump was reduced by 30%, compared with conventional sputter ion pumps using ferrite magnets. For the sake of uniformity of magnetic field, three pieces of magnet were combined into a 100 mm × 150 mm magnet block for the 30 ℓ/s pumping element. The authors coped with the low working temperature (below 150 °C) of the NdFeB magnets by forming a pure and dense chromium oxide film on the inner surface of the stainless steel pump body. With this vacuum thermal oxidation, the outgassing rate of water and hydrogen was considerably reduced so that a high temperature bakeout was unnecessary. The ultimate pressure achieved by the developed pump was much lower than 10−10 mbar even with a low bakeout temperature at 100 °C.

© 2012 American Vacuum Society

ACKNOWLEDGMENT

This research was supported by the Converging Research Center Program through the Ministry of Education, Science and Technology (Grant No. 2011K000768).

Article Outline

  1. INTRODUCTION
  2. DESIGN AND FABRICATION OF THE NOBLE LIGHT SPUTTER ION PUMP
  3. RESULTS AND DISCUSSION
  4. SUMMARY

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KEYWORDS and PACS

Keywords

boron alloys, ion pumps, iron alloys, magnets, neodymium alloys, outgassing, oxidation

PACS

History
Received 26 October 2011
Accepted 25 December 2011
Published online 17 January 2012
Digital Object Identifier
http://dx.doi.org/10.1116/1.3677387

PUBLICATION DATA

ISSN

0734-2101 (print)  
1520-8559 (online)

Publisher

American Vacuum Society

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