Abatement of CF4 and CHF3 byproducts using low-pressure plasmas generated by annular-shaped electrodes

Hur, Min; Lee, Jae O. K.; Hoon Song, Young; Yoo, Hoon A.

doi:doi:10.1116/1.3679407

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Journal of Vacuum Science & Technology A / Volume 30 / Issue 2 / Plasma Science and Technology

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J. Vac. Sci. Technol. A 30, 021304 (2012); http://dx.doi.org/10.1116/1.3679407 (8 pages)

Abatement of CF₄ and CHF₃ byproducts using low-pressure plasmas generated by annular-shaped electrodes

Min Hur¹, Jae O. K. Lee¹, Young Hoon Song¹, and Hoon A. Yoo²

¹Environmental Systems Research Division, Korea Institute of Machinery & Materials, 104 Sinseongno, Yuseong-gu, Daejeon 305-343, Korea
²Department of Mechanical Engineering, Chungnam National University, 99 Daehak-ro, Yuseong-gu, Daejeon 305-764, Korea

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(Published online 1 February 2012)

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Three different driving schemes are tested for a plasma reactor designed to abate the greenhouse gases emitted by the semiconductor industry. The reactor and electrodes all have a concentric annular shape, which allows them to be easily connected to pre-existing pipelines without any disturbance to the exhaust stream. The destruction and removal efficiencies are measured for CF₄ by varying the O₂/CF₄ ratio and pressure. The influences of adding O₂ and H₂O to the byproducts of the CHF₃ abatement process are investigated by analyzing the spectra resulting from Fourier transform infrared spectroscopy measurements. Based on the experimental results we suggest an appropriate combination of driving scheme and reactant gas species for efficient and economical abatement of a mixture of CHF₃ and CF₄. Then, the optimal flow rate of the reactant gas is presented. Finally, the reduction rates for global warming emissions are estimated to demonstrate the feasibility of using our device for abatement of greenhouse gases emitted by the semiconductor industry.

ACKNOWLEDGMENTS

This work is supported by the Korea Small & Medium Business Administration and Korea Research Council for Industrial Science & Technology. The authors thank S.Y. Lee from LOTVACUUM, Co., Ltd. for useful discussions about plasma abatement conditions.

Article Outline

INTRODUCTION
EXPERIMENTAL METHODS
RESULTS AND DISCUSSION
CONCLUSIONS

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KEYWORDS and PACS

Keywords

aerodynamics, air pollution, Fourier transform spectra, gas mixtures, global warming, infrared spectra, plasma materials processing, reduction (chemical)

PACS

89.60.-k

Environmental studies
51.70.+f

Optical and dielectric properties
52.77.-j

Plasma applications

History

Received 22 May 2011
Accepted 23 November 2011
Published online 1 February 2012

Digital Object Identifier

http://dx.doi.org/10.1116/1.3679407

PUBLICATION DATA

ISSN

0734-2101 (print)

1520-8559 (online)

Publisher

American Vacuum Society

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