Temperature dependence of the infrared absorption cross-sections of neutral species commonly found in fluorocarbon plasmas

Nelson, Caleb T.; Overzet, Lawrence J.; Goeckner, Matthew J.

doi:doi:10.1116/1.3679408

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Journal of Vacuum Science & Technology A / Volume 30 / Issue 2 / Plasma Science and Technology

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J. Vac. Sci. Technol. A 30, 021305 (2012); http://dx.doi.org/10.1116/1.3679408 (11 pages)

Temperature dependence of the infrared absorption cross-sections of neutral species commonly found in fluorocarbon plasmas

Caleb T. Nelson, Lawrence J. Overzet, and Matthew J. Goeckner

Department of Electrical Engineering, University of Texas at Dallas, P.O. Box 830688, Richardson, Texas 75083

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(Published online 1 February 2012)

Abstract

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This article serves as a reference for the analysis of Fourier transform infrared spectroscopy data from processing plasmas. Until now, there has been a lack of accurate reference data for addressing the problems of species identification and density measurements in cases of increasing gas temperatures. Our results show that, while the integrated absorption cross-sections do not change significantly as temperature increases, the temperature of the absorbing species can be estimated from the rotational band maximum in most cases. Integrated absorption cross-sections for c-C₃F₆, C₄F₈, C₃F₈, C₂F₆, C₂F₄, and CF₄ are presented for all fundamental bands in the 650 cm⁻¹ to 2000 cm⁻¹ region. In addition, the binary combination bands up to 4000 cm⁻¹ are presented for all species. The temperature of each species has been varied to correspond to neutral temperatures commonly found in processing plasmas.

ACKNOWLEDGMENT

This work was supported in part by a gift from Applied Materials.

Article Outline

INTRODUCTION
EXPERIMENTAL SETUP
DENSITY ESTIMATION FROM INFRARED ABSORBANCE
TEMPERATURE ESTIMATION FROM INFRARED ABSORBANCE
RESULTS AND DISCUSSION
1. C ₃ F ₆
2. c-C ₄ F ₈
3. C ₃ F ₈
4. C ₂ F ₆
5. C ₂ F ₄
6. CF ₄
CONCLUSION

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KEYWORDS and PACS

Keywords

Fourier transform spectra, infrared spectra, plasma density, plasma diagnostics, plasma materials processing

PACS

52.70.Kz

Optical (ultraviolet, visible, infrared) measurements
82.80.Nj

Fourier transform mass spectrometry
33.20.Ea

Infrared spectra
52.25.-b

Plasma properties

History

Received 5 April 2011
Accepted 19 December 2011
Published online 1 February 2012

Digital Object Identifier

http://dx.doi.org/10.1116/1.3679408

PUBLICATION DATA

ISSN

0734-2101 (print)

1520-8559 (online)

Publisher

American Vacuum Society

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