Tribological behavior of Ti-Al-Si-C-N hard coatings deposited by hybrid arc-enhanced magnetron sputtering

Wu, Guizhi; Ma, Shengli; Xu, Kewei; Chu, Paul K

doi:doi:10.1116/1.3676186

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Journal of Vacuum Science & Technology A / Volume 30 / Issue 2 / Thin Films

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J. Vac. Sci. Technol. A 30, 021501 (2012); http://dx.doi.org/10.1116/1.3676186 (7 pages)

Tribological behavior of Ti-Al-Si-C-N hard coatings deposited by hybrid arc-enhanced magnetron sputtering

Guizhi Wu¹, Shengli Ma¹, Kewei Xu¹, and Paul K Chu²

¹State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University, Xi’an 710049, China
²Department of Physics and Materials Science, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, China

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(Published online 11 January 2012)

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Ti-Al-Si-C-N hard coatings are deposited on high speed steel by hybrid arc-enhanced magnetron sputtering, and the hardness, adhesion, and tribological behavior are studied. On account of the nanocomposite structure, the coatings possess hardness of more than 30 GPa. Failure of the coating during the scratch test is due to the buckling and wedge spallation failure mechanism. Compared to Ti-Al-Si-N, the presence of C in the Ti-Al-Si-C-N coatings leads to reduced friction coefficient and wear rate, indicating effective lubrication rendered by amorphous C. According to the wear tracks examined by scanning electron microscopy, the wear mechanism can be explained by plowing abrasion.

ACKNOWLEDGMENTS

This work was supported by the International Science and Technology Cooperation Program of China (Grant No. 2008DFA51470) and Hong Kong Research Grants Council (RGC) General Research Funds (GRF) Grant No. CityU 112510.

Article Outline

INTRODUCTION
EXPERIMENTAL DETAILS
RESULTS AND DISCUSSION
CONCLUSION

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KEYWORDS and PACS

Keywords

abrasion, adhesion, aluminium compounds, buckling, failure (mechanical), friction, hardness, high-pressure effects, lubrication, nanocomposites, scanning electron microscopy, silicon compounds, sputter deposition, sputtered coatings, titanium compounds

PACS

81.40.Pq

Friction, lubrication, and wear
62.50.-p

High-pressure effects in solids and liquids
68.65.-k

Low-dimensional, mesoscopic, nanoscale and other related systems: structure and nonelectronic properties
81.15.Cd

Deposition by sputtering
81.40.Lm

Deformation, plasticity, and creep
81.40.Np

Fatigue, corrosion fatigue, embrittlement, cracking, fracture, and failure

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History

Received 31 August 2011
Accepted 17 December 2011
Published online 11 January 2012

Digital Object Identifier

http://dx.doi.org/10.1116/1.3676186

PUBLICATION DATA

ISSN

0734-2101 (print)

1520-8559 (online)

Publisher

American Vacuum Society

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