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J. Vac. Sci. Technol. A 30, 021503 (2012); http://dx.doi.org/10.1116/1.3683042 (4 pages)
Twin structures of epitaxial SnO2 films grown on a-cut sapphire by metalorganic chemical vapor deposition
School of Physics, Shandong University, Jinan 250100, People’s Republic of China
(Published online 8 February 2012)
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0) sapphire substrates by metalorganic chemical vapor deposition. X-ray diffraction and transmission electron microscopy were employed to characterize the epitaxial relationship and film structure. The films were (101) oriented with pure rutile structure. The in-plane relationship was determined to be SnO2 [010]//Al2O3 [0001] and SnO2 [10
]//Al2O3 [100]. There are three kinds of {101} twins in the SnO2 film. These twins caused high density of planar defects in the film and slight misorientation of the growth plane. The film/substrate interface was flat, while the film surface was rough with steps and inclinations.© 2012 American Vacuum Society
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Article Outline
- INTRODUCTION
- EXPERIMENT
- RESULTS AND DISCUSSION
- SUMMARY AND CONCLUSIONS
KEYWORDS and PACS
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Accepted 19 January 2012
Published online 8 February 2012
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