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J. Vac. Sci. Technol. A 6, 1783 (1988); http://dx.doi.org/10.1116/1.575297 (5 pages)

Raman scattering characterization of carbon bonding in diamond and diamondlike thin films

R. J. Nemanich, J. T. Glass, G. Lucovsky, and R. E. Shroder

Departments of Physics and Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695‐8202

The atomic bonding configurations of carbon bonding in diamond and diamondlike thin films are explored using Raman scattering. The general aspects of Raman scattering from composites are presented. Effects are discussed due to crystalline or amorphous structures, large versus microcrystalline domains, and strong optical absorption and transparent regions. The Raman scattering from diamondlike films shows several features which are attributed to microcrystalline graphitelike structures which all originate from the same region in the sample. In contrast, the spectra of diamond films show features attributed to different components of a composite film. Components identified are crystalline diamond, and disordered and microcrystalline graphitic structures. The presence of precursor microcrystalline or amorphous diamond structures is also suggested.

KEYWORDS and PACS

PACS

  • 68.55.-a

    Thin film structure and morphology

  • 68.60.Wm

    Other nonelectronic physical properties

  • 78.30.Hv

    Other nonmetallic inorganics

  • 78.66.-w

    Optical properties of specific thin films

PUBLICATION DATA

ISSN

0734-2101 (print)  

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