Recent advances in processing of ZnO

Pearton, S. J.; Norton, D. P.; Ip, K.; Heo, Y. W.; Steiner, T.

doi:doi:10.1116/1.1714985

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Journal of Vacuum Science & Technology B / Volume 22 / Issue 3 / REGULAR ARTICLES

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J. Vac. Sci. Technol. B 22, 932 (2004); http://dx.doi.org/10.1116/1.1714985 (17 pages)

Recent advances in processing of ZnO

S. J. Pearton¹, D. P. Norton¹, K. Ip¹, Y. W. Heo¹, and T. Steiner²

¹Department of Materials Science and Engineering, University of Florida, Gainesville, Florida 32611
²Air Force Office of Scientific Research, Arlington, Virginia 22217

(Published online 26 April 2004)

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A review is given of recent results in developing improved fabrication processes for ZnO devices with the possible application to UV light emitters, spin functional devices, gas sensors, transparent electronics, and surface acoustic wave devices. There is also interest in integrating ZnO with other wide band-gap semiconductors, such as the AlInGaN system. In this article, we summarize recent progress in controlling n- and p-type doping, materials processing methods, such as ion implantation for doping or isolation, Ohmic and Schottky contact formation, plasma etching, the role of hydrogen in the background n-type conductivity of many ZnO films, and finally, the recent achievement of room-temperature ferromagnetism in transition-metal (Mn or Co)-doped ZnO. This may lead to another class of spintronic devices, in which the spin of the carriers is exploited rather than the charge as in more conventional structures. © 2004 American Vacuum Society.

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KEYWORDS and PACS

Keywords

zinc compounds, reviews, wide band gap semiconductors, semiconductor thin films, semiconductor doping, ion implantation, ohmic contacts, Schottky barriers, ferromagnetic materials, semimagnetic semiconductors, manganese, cobalt, sputter etching, light emitting devices, gas sensors, surface acoustic wave devices, aluminium compounds, indium compounds, II-VI semiconductors, gallium compounds

PACS

85.40.Ry

Impurity doping, diffusion and ion implantation technology
85.60.Jb

Light-emitting devices
73.30.+y

Surface double layers, Schottky barriers, and work functions
52.77.Bn

Etching and cleaning
07.07.Df

Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
01.30.Rr

Surveys and tutorial papers; resource letters
81.05.Dz

II-VI semiconductors
75.50.Dd

Nonmetallic ferromagnetic materials
75.50.Pp

Magnetic semiconductors