High fidelity blazed grating replication using nanoimprint lithography

Chang, Chih-Hao; Montoya, J. C.; Akilian, M.; Lapsa, A.; Heilmann, R. K.; Schattenburg, M. L.; Li, M.; Flanagan, K. A.; Rasmussen, A. P.; Seely, J. F.; Laming, J. M.; Kjornrattanawanich, B.; Goray, L. I.

doi:doi:10.1116/1.1809614

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Journal of Vacuum Science & Technology B / Volume 22 / Issue 6 / PAPERS FROM THE 48TH INTERNATIONAL CONFERENCE ON ELECTRON, ION, AND PHOTON BEAM / Nanoimprint Fabrication

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J. Vac. Sci. Technol. B 22, 3260 (2004); http://dx.doi.org/10.1116/1.1809614 (5 pages)

High fidelity blazed grating replication using nanoimprint lithography

Chih-Hao Chang¹, J. C. Montoya¹, M. Akilian¹, A. Lapsa¹, R. K. Heilmann¹, M. L. Schattenburg¹, M. Li², K. A. Flanagan³, A. P. Rasmussen⁴, J. F. Seely⁵, J. M. Laming⁵, B. Kjornrattanawanich⁶, and L. I. Goray⁷

¹Space Nanotechnology Laboratory, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139
²Nanonex Corporation, 1 Deer Park Drive, Suite O, Monmouth Junction, New Jersey 08852
³Center for Space Research, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139
⁴Columbia Astrophysics Lab, 550 West 120th Street, New York, New York 10027
⁵Naval Research Laboratory, Space Science Division, Washington, DC 20375
⁶Universities Space Research Association, Brookhaven National Laboratory, Upton, New York 11973
⁷International Intellectual Group, Inc., Penfield, New York 14526

(Published online 13 December 2004)

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We report progress in using nanoimprint lithography to fabricate high fidelity blazed diffraction gratings. Anisotropically etched silicon gratings with 200 nm period and 7.5° blaze angle were successfully replicated onto 100 mm diameter wafers with subnanometer roughness and excellent profile conformity. Out-of-plane distortion induced by residual stress from polymer films was also analyzed and found to be extremely low. The replicated blazed gratings were tested and demonstrated high x-ray diffraction efficiencies. This process was developed for fabricating blazed diffraction gratings for the NASA Constellation-X x-ray telescope.