You are not logged in to this journal. Log In
J. Vac. Sci. Technol. B 27, 2958 (2009); http://dx.doi.org/10.1116/1.3245990 (4 pages)
Low-cost interference lithography
(Published online 3 December 2009)
© 2009 American Vacuum Society
- APPARATUS AND PROCEDURES
- RESULTS AND ANALYSIS
- DISCUSSION AND SUMMARY
KEYWORDS and PACS
Accepted 14 September 2009
Published online 3 December 2009
For access to citing articles, you need to log in.
Access to article objects (figures, tables, multimedia) requires a subscription; log in to view available files.
(Access to supplementary files, where available, is free for this journal.)