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Journal of Vacuum Science & Technology B / Volume 28 / Issue 2 / Regular Articles

J. Vac. Sci. Technol. B 28, 268 (2010); http://dx.doi.org/10.1116/1.3298889 (5 pages)

Flexible field emitter arrays with adjustable carbon nanotube distances and bundle generation

O. Yilmazoglu1, A. Popp2, D. Pavlidis1, and J. J. Schneider2

1Department of High Frequency Electronics, Technische Universität Darmstadt, 64283 Darmstadt, Germany
2Fachbereich Chemie, Eduard-Zintl-Institut, Fachgebiet Anorganische Chemie, Technische Universität Darmstadt, 64287 Darmstadt, Germany

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(Published online 19 March 2010)

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A template assisted technique was used to synthesize carbon nanotubes (CNTs) in a highly ordered manner by a noncatalytic chemical vapor deposition technique. Special self-organized anodic alumina films control the syntheses of highly aligned carbon nanotube arrays with desired tube geometry, adjustable intertube distances, and unique CNT bundle generation, which are extremely important for CNT array optimization with high field enhancement factors and high current densities. These CNT arrays also meet industrial demands such as uniformity, low cost, and easy preparation. The CNT bundle generation was adjusted by the CNT tube-diameter, wall-thickness, and length-controlled growth. Field emission tests showed that the turn-on field of the CNT cathode arrays could be lowered by adjusting the intertube distance. A vacuum field emission triode with self-aligned gate using these CNT arrays as field emitter is also presented. The proposed CNT configuration allows the realization of cathode arrays on flexible substrates and is very promising for improving the characteristics of such devices. Moreover, micro/nanointegration opens the possibility for their mass production.

© 2010 American Vacuum Society

ACKNOWLEDGMENT

The research described in this publication was in part supported by the BMBF under Contract No. 16SV3554, MNI-CNTs.

Article Outline

  1. INTRODUCTION
  2. FABRICATION
    1. Anodic alumina self-organized structure
    2. CNT growth in AAO
  3. FIELD EMISSION MEASUREMENTS
  4. CONCLUSION

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KEYWORDS and PACS

Keywords

carbon nanotubes, cathodes, chemical vapour deposition, field emitter arrays, nanoelectronics, nanofabrication, nanotube devices, self-assembly, triodes, CNT, carbon nanotube, Al203

PACS

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History
Received 14 September 2009
Accepted 4 January 2010
Published online 19 March 2010
Digital Object Identifier
http://dx.doi.org/10.1116/1.3298889

PUBLICATION DATA

ISSN

1071-1023 (print)  
1520-8567 (online)

Publisher

American Vacuum Society

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