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Journal of Vacuum Science & Technology B / Volume 28 / Issue 2 / Regular Articles

J. Vac. Sci. Technol. B 28, 310 (2010); http://dx.doi.org/10.1116/1.3327927 (6 pages)

Selective growth of tungsten oxide nanowires via a vapor-solid process

Haitao Zhang1, Terry T. Xu1, Mingzheng Tang2, Tsing-hua Her2, and Shu-you Li3

1Department of Mechanical Engineering and Engineering Science, The University of North Carolina at Charlotte, Charlotte, North Carolina 28223
2Department of Physics and Optical Science, The University of North Carolina at Charlotte, Charlotte, North Carolina 28223
3NUANCE Center, Northwestern University, Evanston, Illinois 60208

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(Published online 22 March 2010)

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Selective growth of tungsten oxide nanowires has been achieved using a vapor-solid (VS) process without the assistance of any catalysts. To achieve selective growth, low vapor supersaturation was employed to suppress the spontaneous nucleation of tungsten oxide during the VS process, and patterned tungsten coating was introduced to provide seed nuclei, which promotes the growth of tungsten oxide nanowires and control their growth sites. Patterned tungsten oxide nanowire arrays have been fabricated using simple patterning methods, such as shadow mask and laser-induced nanograting growth. The effects of the source heating temperature and the growth temperature on the nanowire growth have been investigated, showing the morphology of tungsten oxide deposition was sensitive to the vapor supersaturation controlled by both temperatures.

© 2010 American Vacuum Society

ACKNOWLEDGMENTS

H. Zhang thanks the start-up fund from the Department of Mechanical Engineering and Engineering Science (MEES Department), and Charlotte Research Institute at the University of North Carolina at Charlotte (UNC Charlotte). T. Her would like to acknowledge the financial support from National Science Foundation under Grant No. 0708555. T. T. Xu appreciates the start-up support from MEES Department at UNC Charlotte. The authors are grateful to the MEES Department and the Center of Optoelectronics and Optical Communications at UNC Charlotte for the support of multiple user facilities, and the NUANCE center at Northwestern University for the TEM studies.

Article Outline

  1. INTRODUCTION
  2. EXPERIMENT
  3. RESULTS AND DISCUSSION
  4. CONCLUSIONS

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KEYWORDS and PACS

Keywords

nanowires, nucleation, tungsten compounds, tungsten oxide, tungsten

PACS

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History
Received 1 October 2009
Accepted 25 January 2010
Published online 22 March 2010
Digital Object Identifier
http://dx.doi.org/10.1116/1.3327927

PUBLICATION DATA

ISSN

1071-1023 (print)  
1520-8567 (online)

Publisher

American Vacuum Society

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