Suspended slab and photonic crystal waveguides in lithium niobate

Si, Guangyuan; Teo, Ee Jin; Bettiol, Andrew A.; Teng, Jinghua; Danner, Aaron J.

doi:doi:10.1116/1.3327925

Volume/Page
Keyword
DOI
Citation
Advanced

Volume: Page/Article:

Search Content Type

article doi:

Citation:

You are not logged in to this journal. Log In

Journal of Vacuum Science & Technology B / Volume 28 / Issue 2 / Regular Articles

Previous Article | Next Article

J. Vac. Sci. Technol. B 28, 316 (2010); http://dx.doi.org/10.1116/1.3327925 (5 pages)

Suspended slab and photonic crystal waveguides in lithium niobate

Guangyuan Si¹, Ee Jin Teo², Andrew A. Bettiol², Jinghua Teng³, and Aaron J. Danner¹

¹Department of Electrical and Computer Engineering, Centre for Optoelectronics, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Singapore
²Department of Physics, Centre for Ion Beam Applications, National University of Singapore, 2 Science Drive 3, Singapore 117542, Singapore
³Institute of Materials Research and Engineering, 3 Research Link, Singapore 117602, Singapore

View Map

(Published online 22 March 2010)

Abstract

References (20)

Citing Articles (3)

Article Objects (6)

Alerts
- Alert Me When Cited
- Alert Me When Corrected
Tools
Share
- Email Abstract
- Connotea
- CiteULike
- del.icio.us
- BibSonomy
- Tweet this Article
- Add to Facebook

Full Text: Read Online (HTML) | Download PDF | Rent Article | Buy PDF (US$28) | View Cart

Suspended waveguides have been widely applied to silicon-on-insulator structures because they are easily fabricated with processing techniques similar to those of integrated circuit design. However, it is difficult to fabricate such structures in lithium niobate, which is also a very important material for optoelectronics. One main challenge is the difficulty of etching lithium niobate. In this work, the authors show a method to fabricate suspended slab waveguides in lithium niobate by combining ion implantation, focused ion beam milling, and selective wet etching techniques. The method does not involve wafer bonding or crystal ion slicing and is entirely monolithic. Lattice damage can be introduced to a buried thin layer of a certain depth beneath the sample surface by ion implantation, resulting in a considerable wet etching selectivity to bulk material. The etching rate has been investigated to control the size of the suspended membrane. Fabrication of suspended photonic crystal waveguides has also been demonstrated. The results show an effective method of fabricating suspended devices in lithium niobate, which enables new applications such as waveguides, modulators, and infrared detectors.

ACKNOWLEDGMENT

The authors acknowledge funding from the National University of Singapore Cross-Faculty under Grant No. R263000529646.

Article Outline

INTRODUCTION
FABRICATION
RESULTS AND DISCUSSION
CONCLUSION

View more related articles.

KEYWORDS and PACS

Keywords

etching, ferroelectric materials, focused ion beam technology, ion implantation, lithium compounds, milling, optical fabrication, optical waveguides, photonic crystals, slabs, LiNbO3, wet-chemical etching

PACS

42.79.Gn

Optical waveguides and couplers
42.70.Qs

Photonic bandgap materials
77.84.-s

Dielectric, piezoelectric, ferroelectric, and antiferroelectric materials
77.80.-e

Ferroelectricity and antiferroelectricity
81.65.Cf

Surface cleaning, etching, patterning

RELATED DATABASES

To view database links for this article, you need to log in.

History

Received 2 November 2009
Accepted 25 January 2010
Published online 22 March 2010

Digital Object Identifier

http://dx.doi.org/10.1116/1.3327925

PUBLICATION DATA

ISSN

1071-1023 (print)

1520-8567 (online)

Publisher

American Vacuum Society

For access to fully linked references, you need to log in.

For access to citing articles, you need to log in.

Figures (6)

Access to article objects (figures, tables, multimedia) requires a subscription; log in to view available files.
(Access to supplementary files, where available, is free for this journal.)