Two step optimized process for scanning tunneling microscopy tip fabrication

Bastiman, F.; Cullis, A. G.; Hopkinson, M.; Briston, K. J.

doi:doi:10.1116/1.3359608

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Journal of Vacuum Science & Technology B / Volume 28 / Issue 2 / Regular Articles

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J. Vac. Sci. Technol. B 28, 371 (2010); http://dx.doi.org/10.1116/1.3359608 (5 pages)

Two step optimized process for scanning tunneling microscopy tip fabrication

F. Bastiman¹, A. G. Cullis¹, M. Hopkinson¹, and K. J. Briston²

¹Department of Electronic and Electrical Engineering, University of Sheffield, Mappin Street, Sheffield S1 3JD, United Kingdom
²Department of Engineering Materials, University of Sheffield, Mappin Street, Sheffield S1 3JD, United Kingdom

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(Published online 23 March 2010)

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Fabrication of ultrasharp tips for scanning tunneling microscopy is inherently a two-step procedure, typically involving an etch process and postetch cleaning. From the myriad of etching parameters available in literature a procedure is presented that allows quantitative optimization and the routine production of tips with 3–10 nm radius of curvature. These ideally shaped tips require final oxide removal. Utilizing a custom designed e-beam heater element, oxide removal without localized melting is realized.

ACKNOWLEDGMENTS

The authors would like to thank Y. Peng for his expertise in tip cleaning methodologies, G. Hill for assistance with SEM imaging, and I. Lyne and H. Jenniches for assistance with the e-beam heater construction.

Article Outline

INTRODUCTION
EXPERIMENT
1. Etching
2. Cleaning
3. STM
RESULTS
1. Etching types
2. In situ annealing
3. STM imaging
DISCUSSION
CONCLUSION

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KEYWORDS and PACS

Keywords

etching, optimisation, scanning tunnelling microscopy, Material names: W, Au, Si

PACS

68.37.Ef

Scanning tunneling microscopy (including chemistry induced with STM)
81.65.Cf

Surface cleaning, etching, patterning
07.79.Cz

Scanning tunneling microscopes

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History

Received 7 October 2009
Accepted 8 February 2010
Published online 23 March 2010

Digital Object Identifier

http://dx.doi.org/10.1116/1.3359608

PUBLICATION DATA

ISSN

1071-1023 (print)

1520-8567 (online)

Publisher

American Vacuum Society

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