Development of in situ analyzer of field-emission devices

Kawasaki, Michito; He, Zhen; Gotoh, Yasuhito; Tsuji, Hiroshi; Ishikawa, Junzo

doi:doi:10.1116/1.3325835

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Journal of Vacuum Science & Technology B / Volume 28 / Issue 2 / PAPERS FROM THE 22nd INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE / Fundamental

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J. Vac. Sci. Technol. B 28, C2A77 (2010); http://dx.doi.org/10.1116/1.3325835 (6 pages)

Development of in situ analyzer of field-emission devices

Michito Kawasaki, Zhen He, Yasuhito Gotoh, Hiroshi Tsuji, and Junzo Ishikawa

Department of Electronic Science and Engineering, Kyoto University, Kyotodaigaku-Katsura, Nishikyo-ku, Kyoto 615-8510, Japan

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(Published online 1 April 2010)

Abstract

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The authors are developing an in situ analyzer of field-emission devices that is based on the Seppen–Katamuki (SK) analysis, and they report preliminary results as proof of concept. One of the major differences in the present system from the conventional system is that field-emission characteristics are measured under modulation of emitter voltage. This enables to generate a SK plot, which requires the intercept and slope of the Fowler–Nordheim plot. Field-emission microscope images are acquired by a charge-coupled device camera. The field-emission characteristics of a tungsten-needle emitter were acquired and the SK plots were generated. They found that the fluctuation of field-emission current analyzed by the present system was expressed by motion along a linear line in the SK chart. The above result agrees with those obtained by previous studies.

ACKNOWLEDGMENTS

The authors are much indebted to Hirotake Ishii, Department of Socio-Environmental Energy Science, Kyoto University, for his contribution to the image-controlling software. The present study was partly supported by Japan Society for the Promotion of Science, through a Grant-in-Aid for Scientific Research No. 19560024.

Article Outline

INTRODUCTION
DESIGN OF IN SITU ANALYZER
1. Concept of in situ analyzer
2. Acquisition system of the field-emission characteristics and FEM image
  1. Recording of the field-emission characteristics
  2. Recording of FEM image
3. Analysis of the current-voltage characteristics
EXPERIMENTAL PROCEDURE
RESULTS
DISCUSSION
CONCLUSION

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KEYWORDS and PACS

Keywords

cameras, charge-coupled devices, field emission electron microscopes, tungsten

PACS

07.78.+s

Electron, positron, and ion microscopes; electron diffractometers
07.68.+m

Photography, photographic instruments; xerography

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History

Received 9 November 2009
Accepted 25 January 2010
Published online 1 April 2010

Digital Object Identifier

http://dx.doi.org/10.1116/1.3325835

PUBLICATION DATA

ISSN

1071-1023 (print)

1520-8567 (online)

Publisher

American Vacuum Society

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