Experimental evaluation of the influence of shank shape of field ion emitter on the angular current density

Kobayashi, Y.; Sugiyama, Y.; Morikawa, Y.; Kajiwara, K.; Hata, K.

doi:doi:10.1116/1.3360302

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Journal of Vacuum Science & Technology B / Volume 28 / Issue 2 / PAPERS FROM THE 22nd INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE / Fundamental

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J. Vac. Sci. Technol. B 28, C2A90 (2010); http://dx.doi.org/10.1116/1.3360302 (4 pages)

Experimental evaluation of the influence of shank shape of field ion emitter on the angular current density

Y. Kobayashi¹, Y. Sugiyama², Y. Morikawa¹, K. Kajiwara³, and K. Hata³

¹Graduate School of Engineering, Mie University, 1577 Kurima-Machiya, Tsu 514-8507, Japan
²Graduate School of Engineering, Mie University, 1577 Kurima-Machiya, Tsu 514-8507, Japan, Center for Ultimate Technology on Nano-Electronics (CUTE), Mie University, 1577 Kurima-Machiya, Tsu 514-8507, Japan, and SII NanoTechnology Inc., 36-1 Takenoshita, Oyama-cho, Sunto-gun, Shizuoka 410-1393, Japan
³Graduate School of Engineering, Mie University, 1577 Kurima-Machiya, Tsu 514-8507, Japan and Center for Ultimate Technology on Nano-Electronics (CUTE), Mie University, 1577 Kurima-Machiya, Tsu 514-8507, Japan

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(Published online 1 April 2010)

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An adequate emitter shape for a gas field ion source was investigated to obtain a higher angular current density, dI/dΩ. Single-crystalline 〈111〉-oriented tungsten emitters having a similar tip radius of curvature and a different taper angle of emitter shank were prepared by dc- and ac-electrochemical polishing. The tip apex of the emitters was terminated with a tungsten trimer by means of remolding and a field evaporation processes. The helium ion currents emitted from these trimers were measured as a function of helium pressure. The ion current and the dI/dΩ obtained from the emitter with a taper angle of 1.5° were enhanced by factors of 2.7 and of 3.9, respectively, compared to those from an emitter with a taper angle of 14.5°. These experimental results suggest that to obtain a higher dI/dΩ, the emitter having a narrower taper angle is better.

ACKNOWLEDGMENT

This work was promoted by the national project for elemental technology for next-generation electron microscopy, sponsored by the Ministry of Education, Culture, Sports, Science and Technology of Japan.

Article Outline

INTRODUCTION
EXPERIMENT
RESULTS AND DISCUSSION
CONCLUSION

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KEYWORDS and PACS

Keywords

current density, evaporation, field ion emission, polishing, tungsten, tungsten, helium, noble gases

PACS

85.45.Db

Field emitters and arrays, cold electron emitters
81.65.Ps

Polishing, grinding, surface finishing
79.70.+q

Field emission, ionization, evaporation, and desorption

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History

Received 11 September 2009
Accepted 16 February 2010
Published online 1 April 2010

Digital Object Identifier

http://dx.doi.org/10.1116/1.3360302

PUBLICATION DATA

ISSN

1071-1023 (print)

1520-8567 (online)

Publisher

American Vacuum Society

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