Study of the synthesis of tungsten trioxide nanostructured arrays by tungsten hot filament chemical vapor deposition method and their field emission properties

Lu, Di; Liang, Bo; Ogino, Akihisa; Nagatsu, Masaaki

doi:doi:10.1116/1.3292599

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Journal of Vacuum Science & Technology B / Volume 28 / Issue 2 / PAPERS FROM THE 22nd INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE / Fundamental

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J. Vac. Sci. Technol. B 28, C2A98 (2010); http://dx.doi.org/10.1116/1.3292599 (6 pages)

Study of the synthesis of tungsten trioxide nanostructured arrays by tungsten hot filament chemical vapor deposition method and their field emission properties

Di Lu¹, Bo Liang², Akihisa Ogino², and Masaaki Nagatsu²

¹Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8561, Japan and Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Science, Dushu Lake Higher Education Town, Ruoshui Road 398, Suzhou Industrial Park, 215125 Suzhou, People's Republic of China,
²Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8561, Japan

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(Published online 1 April 2010)

Abstract

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Tungsten trioxides (WO₃) nanorod arrays had been fabricated at different substrate temperatures by hot filament chemical vapor deposition. The morphology of the WO₃ nanorod array is significantly dependent on the substrate temperature in a relatively narrow range (600–800 °C). Through the x-ray diffraction pattern, different preference growth directions of WO₃ nanorods at different substrate temperatures were observed. A discussion of the possible growth mechanism is given. Furthermore, the substrate temperature during the growth was also found to be closely related with the morphologies of the nanorod arrays and their field emission properties.

ACKNOWLEDGMENTS

This work has been performed under the 21st Century COE Program “Research and Education Center of Nanovision Science” by the Japan Society for Promotion of Science (JSPS). The authors would like to thank and associate Murakami for the FE-SEM analysis and Fukaya for the XRD analysis.

Article Outline

INTRODUCTION
EXPERIMENT
RESULTS AND DISCUSSION
CONCLUSION

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KEYWORDS and PACS

Keywords

chemical vapour deposition, field emission, nanofabrication, tungsten compounds, wide band gap semiconductors, X-ray diffraction, tungsten trioxide, hot filament chemical vapor deposition, field emission

PACS

81.16.-c

Methods of micro- and nanofabrication and processing
81.07.Bc

Nanocrystalline materials
61.46.-w

Structure of nanoscale materials
81.15.Gh

Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)
79.70.+q

Field emission, ionization, evaporation, and desorption

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History

Received 11 September 2009
Accepted 21 December 2009
Published online 1 April 2010

Digital Object Identifier

http://dx.doi.org/10.1116/1.3292599

PUBLICATION DATA

ISSN

1071-1023 (print)

1520-8567 (online)

Publisher

American Vacuum Society

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