Efficient high-current field emission from arrays of carbon nanotube columns

Navitski, A.; Müller, G.; Sakharuk, V.; Prudnikava, A. L.; Shulitski, B. G.; Labunov, V. A.

doi:doi:10.1116/1.3300062

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Journal of Vacuum Science & Technology B / Volume 28 / Issue 2 / PAPERS FROM THE 22nd INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE / Materials

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J. Vac. Sci. Technol. B 28, C2B14 (2010); http://dx.doi.org/10.1116/1.3300062 (6 pages)

Efficient high-current field emission from arrays of carbon nanotube columns

A. Navitski¹, G. Müller¹, V. Sakharuk¹, A. L. Prudnikava², B. G. Shulitski², and V. A. Labunov²

¹FB C Physik, Bergische Universität Wuppertal, D-42119 Wuppertal, Germany
²Belarusian State University of Informatics and Radioelectronics, Brovka Str. 6, 220027 Minsk, Belarus

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(Published online 29 March 2010)

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Arrays of entangled carbon nanotube (CNT) columns on patterned n-Si substrates were fabricated by an atmospheric chemical vapor deposition with a ferrocene/xylene mixture. Preferential CNT growth in the opened Si windows of a 300 nm thick SiO₂ layer was achieved by adjusting the parameters of the synthesis process. The resulting multiwalled CNT formed vertically aligned columns up to 50 μm net height in four arrays of 10, 30, or 50 μm patch diameter and 100 or 160 μm pitch. The field emission (FE) properties of such structured cathodes were measured by a FE scanning microscope using tip anodes of adjusted size. Well-aligned FE from nearly 100% of the patches at electric field lower than 10 V/μm was observed, but less pronounced FE occurred between the arrays too. High current capability of most patches up to milliamperes, suggesting multiple CNT emitters per patch, was achieved. Integral FE measurements in the diode configuration with luminescence screen and processing under N₂ and O₂ exposures of up to 3×10⁻⁵ mbar demonstrated fairly homogeneous current distribution and long-term stability of the CNT cathodes.

ACKNOWLEDGMENTS

The authors would like to thank A. S. Basaev and A. Pavlov from the Scientific and Manufacturing Complex “Technological Centre, Moscow Institute of Electronic Technology,” for the fabrication of the mask and photolithographic structuring of the Si substrates. The authors are grateful to the Head of the Government Center “BelMicroAnalysis” (scientific and technical center “Belmicrosystems”) V. A. Pilipenko for access to SEM facilities. Stimulating and fruitful discussions with G. Gorokh are gratefully acknowledged.

Article Outline

INTRODUCTION
CATHODE FABRICATION AND MEASUREMENT TECHNIQUES
FIELD EMISSION RESULTS AND DISCUSSION
CONCLUSIONS

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KEYWORDS and PACS

Keywords

anodes, carbon nanotubes, cathodes, chemical vapour deposition, field emission, field emitter arrays, nanotube devices, vacuum microelectronics, carbon nanotubes, silicon, silicon oxide, ferrocene, xylene

PACS

79.70.+q

Field emission, ionization, evaporation, and desorption
85.35.Kt

Nanotube devices
85.45.Db

Field emitters and arrays, cold electron emitters

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History

Received 14 September 2009
Accepted 4 January 2010
Published online 29 March 2010

Digital Object Identifier

http://dx.doi.org/10.1116/1.3300062

PUBLICATION DATA

ISSN

1071-1023 (print)

1520-8567 (online)

Publisher

American Vacuum Society

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