In situ transmission electron microscopy observation of electron-beam-deposited Pt field emitter during field emission and field evaporation

Murakami, K.; Matsubara, N.; Ichikawa, S.; Wakaya, F.; Takai, M.

doi:doi:10.1116/1.3360902

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Journal of Vacuum Science & Technology B / Volume 28 / Issue 2 / PAPERS FROM THE 22nd INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE / Fabrication

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J. Vac. Sci. Technol. B 28, C2C13 (2010); http://dx.doi.org/10.1116/1.3360902 (3 pages)

In situ transmission electron microscopy observation of electron-beam-deposited Pt field emitter during field emission and field evaporation

K. Murakami¹, N. Matsubara¹, S. Ichikawa², F. Wakaya¹, and M. Takai¹

¹Center for Quantum Science and Technology under Extreme Conditions and Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531, Japan
²Institute for Nanoscience Design, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531, Japan

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(Published online 30 March 2010)

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An internal structure of Pt field emitters fabricated by electron-beam-induced deposition (EBID) was investigated by in situ transmission electron microscopy during field emission and field evaporation. The internal structure of Pt field emitters was unchanged during field emission with an emission current of less than 480 nA. On the contrary, the top of Pt field emitters was sharpened after field evaporation. The Pt nanocrystals also moved to the Pt tip top after field evaporation. These results indicate the possibility of the sharpening of Pt field emitters by field evaporation, which would improve the field emission properties of Pt field emitters fabricated by EBID.

ACKNOWLEDGMENTS

This work was partially supported by the Ministry of Education, Culture, Sports, Science and Technology of Japan, through a Grant-in-Aid for Young Scientists B (Grant No. 20410108) and a Grant-in-Aid for Scientific Research A (Grant No. 19206008).

Article Outline

INTRODUCTION
EXPERIMENT
RESULTS AND DISCUSSION
CONCLUSION

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KEYWORDS and PACS

Keywords

EBIC, field evaporation, nanostructured materials, platinum, transmission electron microscopy, Pt, C, C5H5Pt(CH3)3

PACS

79.70.+q

Field emission, ionization, evaporation, and desorption
81.07.Bc

Nanocrystalline materials
61.46.-w

Structure of nanoscale materials
07.78.+s

Electron, positron, and ion microscopes; electron diffractometers

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History

Received 29 October 2009
Accepted 16 February 2010
Published online 30 March 2010

Digital Object Identifier

http://dx.doi.org/10.1116/1.3360902

PUBLICATION DATA

ISSN

1071-1023 (print)

1520-8567 (online)

Publisher

American Vacuum Society

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