Enhancement of ion-induced bending phenomenon using a double-layered film for field emitter array fabrication

Yoshida, T.; Nagao, M.; Kanemaru, S.

doi:doi:10.1116/1.3276096

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Journal of Vacuum Science & Technology B / Volume 28 / Issue 2 / PAPERS FROM THE 22nd INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE / Fabrication

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J. Vac. Sci. Technol. B 28, C2C1 (2010); http://dx.doi.org/10.1116/1.3276096 (4 pages)

Enhancement of ion-induced bending phenomenon using a double-layered film for field emitter array fabrication

T. Yoshida, M. Nagao, and S. Kanemaru

National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1, Umezono, Tsukuba, Ibaraki 305-8568, Japan

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(Published online 19 March 2010)

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The authors proposed a simple fabrication technique of field emitter array based on a ion-induced bending (IIB) phenomenon. This technique is a very simple two-step process, involving the formation of a cantilever and subsequent ion irradiation. To form a vertical thin film emitter with practical ion dose, however, only a few specific film materials with limited thickness can be used. Therefore, an enhancement method of the IIB phenomenon is necessary. To enhance the IIB phenomenon, the authors proposed the double-layered film method. It was found that the ion-induced bending effect could be extremely enhanced by using a double-layered film method. The required dose could consequently be decreased to less than 5×10¹⁵ cm⁻² in the case of using a heavy element for the cantilever film. This methodology increases the potential of ion-induced bending as a simple fabrication technique for FEA device structures.

ACKNOWLEDGMENT

A part of this work was conducted at the AIST Nano-Processing Facility (NPF).

Article Outline

INTRODUCTION
INVESTIGATION OF IIB PHENOMENON
PREDICTION OF IIB ENHANCEMENT
DEMONSTRATION OF IIB ENHANCEMENT METHOD
SUMMARY

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KEYWORDS and PACS

Keywords

cantilevers, field emitter arrays, ion beam effects, molybdenum, thin films

PACS

85.45.Db

Field emitters and arrays, cold electron emitters
68.55.-a

Thin film structure and morphology
61.80.Jh

Ion radiation effects

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History

Received 22 September 2009
Accepted 30 November 2009
Published online 19 March 2010

Digital Object Identifier

http://dx.doi.org/10.1116/1.3276096

PUBLICATION DATA

ISSN

1071-1023 (print)

1520-8567 (online)

Publisher

American Vacuum Society

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