Development of a CdTe x-ray imaging device driven by a vertical thin film field emission array

Tsunekawa, Yuki; Nakagawa, Masashi; Morii, Hisashi; Nagao, Masayoshi; Yoshida, Tomoya; Kanemaru, Seigo; Neo, Yoichiro; Aoki, Toru; Mimura, Hidenori

doi:doi:10.1116/1.3318683

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Journal of Vacuum Science & Technology B / Volume 28 / Issue 2 / PAPERS FROM THE 22nd INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE / Applications

J. Vac. Sci. Technol. B 28, C2D22 (2010); http://dx.doi.org/10.1116/1.3318683 (4 pages)

Development of a CdTe x-ray imaging device driven by a vertical thin film field emission array

Yuki Tsunekawa¹, Masashi Nakagawa¹, Hisashi Morii¹, Masayoshi Nagao², Tomoya Yoshida², Seigo Kanemaru², Yoichiro Neo¹, Toru Aoki¹, and Hidenori Mimura¹

¹Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku Naka-ku, Hamamatsu 432-8011, Japan
²National Institute of Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba 305-8568, Japan

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(Published online 23 March 2010)

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The authors describe a novel CdTe x-ray imaging device that is driven by an electron beam from a field-emitter array. This CdTe x-ray imaging device comprises a CdTe Schottky diode with a vertical thin-film field-emitter array (VTF-FEA). The VTF-FEA was fabricated by an ion-induced bending process and an etch-back technique. The output signal from the detector was obtained through the recombination of x-ray-generated holes and electrons emitted from the VTF-FEA. The output signal clearly depended on the intensity of the x-ray beam. The shape of a Cu plate was successfully detected by the VTF-FEA-driven CdTe diode.

ACKNOWLEDGMENTS

The authors would like to thank S. Yamashita and K. Matsubara for their technical assistance. The work was supported, in part, by the Shizuoka University 21st COE (Center of Excellence) Program and Grant-in-Aid for Scientific Research from the Ministry of Education, Culture, Sports, Technology and Science, Japan (20360156).

Article Outline

INTRODUCTION
OPERATING PRINCIPLE OF THE X-RAY IMAGE SENSOR DRIVEN BY A FEA
EXPERIMENTS AND RESULTS
1. Matrix-structured VTF-FEA
2. CdTe Schottky diode
3. CdTe x-ray imaging device using a VTF-FEA
CONCLUSION

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KEYWORDS and PACS

Keywords

cadmium compounds, electron field emission, etching, field emitter arrays, II-VI semiconductors, Schottky diodes, X-ray imaging, x-ray imaging sensor, vertical thin film-field emission array, CdTe

PACS

07.85.-m

X- and γ-ray instruments
85.45.Db

Field emitters and arrays, cold electron emitters

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History

Received 25 September 2009
Accepted 11 January 2010
Published online 23 March 2010

Digital Object Identifier

http://dx.doi.org/10.1116/1.3318683

PUBLICATION DATA

ISSN

1071-1023 (print)

1520-8567 (online)

Publisher

American Vacuum Society

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