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J. Vac. Sci. Technol. B 28, L9 (2010); http://dx.doi.org/10.1116/1.3298861 (4 pages)

Observation of visible cathodoluminescence from Nd- and Dy-ion-implanted Si

Shinji Kawai, Kenta Ono, and Teruaki Motooka

Department of Materials Science and Engineering, Kyushu University, 744 Motooka, Fukuoka 819-0395, Japan

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(Published online 24 March 2010)

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© 2010 American Vacuum Society

ACKNOWLEDGMENT

The authors would like to thank Prof. S. Komuro of Toyo University for his useful discussions.

Article Outline

  1. INTRODUCTION
  2. EXPERIMENT
  3. RESULTS AND DISCUSSION
  4. CONCLUSION

KEYWORDS and PACS

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PUBLICATION DATA

ISSN

1071-1023 (print)  
1520-8567 (online)

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