Fabrication of cone-shaped subwavelength structures by utilizing a confined convective self-assembly technique and inductively coupled-plasma reactive-ion etching

Kim, Dae-Seon; Park, Min-Su; Jang, Jae-Hyung

doi:doi:10.1116/1.3556962

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Journal of Vacuum Science & Technology B / Volume 29 / Issue 2 / Letters

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J. Vac. Sci. Technol. B 29, 020602 (2011); http://dx.doi.org/10.1116/1.3556962 (5 pages)

Fabrication of cone-shaped subwavelength structures by utilizing a confined convective self-assembly technique and inductively coupled-plasma reactive-ion etching

Dae-Seon Kim¹, Min-Su Park¹, and Jae-Hyung Jang²

¹School of Information and Communications, WCU Department of Nanobio Materials and Electronics, Gwangju Institute of Science and Technology, 1 Oryongdong, Buk-gu, Gwangju 500-712, South Korea
²School of Information and Communications, WCU Department of Nanobio Materials and Electronics, and Research Institute of Solar and Sustainable Energies, Gwangju Institute of Science and Technology, 1 Oryongdong, Buk-gu, Gwangju 500-712, South Korea

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(Published online 7 March 2011)

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Cone-shaped subwavelength structures (SWSs) were fabricated on a GaAs substrate by utilizing a confined convective self-assembly process followed by inductively coupled-plasma reactive-ion etching. A self-assembled polystyrene monolayer was used as an etch mask for pattern transfer onto the GaAs substrate. The fabricated SWS, having a cone profile with an aspect ratio of 1.5 and a 300 nm pitch, exhibited very low reflectance throughout the solar spectrum range and exhibited wide tolerance to different optical incidence angles. Reflectance of the cone-shaped SWS on the GaAs surface was less than 4% in a spectral range of 300–1000 nm under a normal incidence condition.

ACKNOWLEDGMENTS

The work was supported by a NRF grant (Grant No. R01-2007-000-10843-0), a grant (Code No. 20090006) from the Development of Marine Environmental Sensors Using Nano and Photonics Technology Program funded by the Ministry of Maritime Affairs and Fisheries of the Korean Government, and the Center for Distributed Sensor Network at GIST.

Article Outline

INTRODUCTION
EXPERIMENT
RESULTS AND DISCUSSION
CONCLUSIONS

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KEYWORDS and PACS

Keywords

infrared spectra, materials preparation, monolayers, polymers, reflectivity, refractive index, self-assembly, sputter etching, ultraviolet spectra, visible spectra

PACS

81.05.Lg

Polymers and plastics; rubber; synthetic and natural fibers; organometallic and organic materials
78.20.Ci

Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)
52.77.Bn

Etching and cleaning
78.40.Me

Organic compounds and polymers
78.30.Jw

Organic compounds, polymers
81.20.-n

Methods of materials synthesis and materials processing

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History

Received 9 September 2010
Accepted 31 January 2011
Published online 7 March 2011

Digital Object Identifier

http://dx.doi.org/10.1116/1.3556962

PUBLICATION DATA

ISSN

1071-1023 (print)

1520-8567 (online)

Publisher

American Vacuum Society

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