Recent developments and design challenges in continuous roller micro- and nanoimprinting

Dumond, Jarrett J.; Yee Low, Hong

doi:doi:10.1116/1.3661355

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Journal of Vacuum Science & Technology B / Volume 30 / Issue 1 / Review Article

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J. Vac. Sci. Technol. B 30, 010801 (2012); http://dx.doi.org/10.1116/1.3661355 (28 pages)

Recent developments and design challenges in continuous roller micro- and nanoimprinting

Jarrett J. Dumond and Hong Yee Low

Institute of Materials Research & Engineering, 3 Research Link, Singapore, 117602

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(Published online 1 December 2011)

Abstract

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As an emerging technology for the manufacture of micro- and nano-scale patterns, continuous imprinting; otherwise known as roll-to-roll or roller imprinting, is attracting interest from researchers around the world because of its inherent advantages of low cost, high throughput, large area patterning. This technology is an evolutionary advance on the more traditional nanoimprint lithography developed in the 1990s, which is considered a batch mode, or dis-continuous patterning approach. In recent years, a number of commercial applications have been discovered which require low cost, large area patterning, particularly displays, optical coatings and films, and biological applications such as anti-fouling surfaces and micro-fluidic devices. This review covers a variety of continuous imprinting approaches, highlights challenges, and surveys progress towards high speed production of micro- and nanoscale features for these applications and others using this platform technology.

ACKNOWLEDGMENTS

The authors would like to express sincere gratitude towards the Institute of Materials Research and Engineering (IMRE), Exploit Technologies Pte Ltd. (ETPL), and the Science and Engineering Research Council (SERC) of the Agency of Science, Technology and Research (A*STAR), Republic of Singapore for their financial support.

Article Outline

INTRODUCTION
COMPARISONS TO BATCH MODE IMPRINT LITHOGRAPHY
THEORETICAL MODEL FOR FILLING TIME
CONTINUOUS ROLLER IMPRINTING OF THERMOPLASTIC MATERIALS
1. Industrial applications
2. Conventional processing and tool setup
3. Recent innovations to the conventional 2-roller setup
4. Double-sided and multilayer roller imprinting of thermoplastic webs
5. Concluding remarks
CONTINUOUS IMPRINTING OF UV CURABLE MATERIALS
1. Industrial applications
2. Recent studies and proposed tool designs
3. Concluding remarks
ROLLER MOLD FABRICATION
1. Conventional sheet mold fabrication and wrapping techniques
2. Seamless roller mold fabrication techniques
3. Soft material approaches to seamless roller mold fabrication
4. Concluding remarks
CONCLUSIONS

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KEYWORDS and PACS

Keywords

nanolithography, nanopatterning, soft lithography

PACS

81.16.Nd

Micro- and nanolithography
81.16.Rf

Micro- and nanoscale pattern formation

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History

Received 19 August 2011
Accepted 22 September 2011
Published online 1 December 2011

Digital Object Identifier

http://dx.doi.org/10.1116/1.3661355

PUBLICATION DATA

ISSN

1071-1023 (print)

1520-8567 (online)

Publisher

American Vacuum Society

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