Roughness optimization of electron-beam exposed hydrogen silsesquioxane for immobilization of DNA origami

Shah, Faisal A.; Nan Kim, Kyoung; Lieberman, Marya; Bernstein, Gary H.

doi:doi:10.1116/1.3676054

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Journal of Vacuum Science & Technology B / Volume 30 / Issue 1 / Nanometer Science & Technology

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J. Vac. Sci. Technol. B 30, 011806 (2012); http://dx.doi.org/10.1116/1.3676054 (6 pages)

Roughness optimization of electron-beam exposed hydrogen silsesquioxane for immobilization of DNA origami

Faisal A. Shah¹, Kyoung Nan Kim², Marya Lieberman², and Gary H. Bernstein¹

¹Department of Electrical Engineering, University of Notre Dame, Notre Dame, Indiana 46556
²Department of Chemistry and Biochemistry, University of Notre Dame, Notre Dame, Indiana 46556

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(Published online 12 January 2012)

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A novel way to immobilize deoxyribonucleic acid (DNA) origami on a conventional substrate using hydrogen silsesquioxane (HSQ) as a functionalized platform is demonstrated. An alternative approach to quantifying roughness of the HSQ surfaces for 2D DNA origami immobilization is also introduced. Effects of oxygen plasma treatment on the surface roughness and functionalization (for DNA origami immobilization) of exposed and developed HSQ patterns are characterized. Surface root mean square roughness of electron-beam exposed HSQ with various thicknesses is investigated and optimized down to 0.2 nm for ultrathin (sub-15 nm) HSQ patterns.

ACKNOWLEDGMENT

This research was supported by the Office of Naval Research (ONR) Grant No. N-00014-09-1-0184.

Article Outline

INTRODUCTION
EXPERIMENT
1. HSQ thickness versus roughness
2. Oxygen plasma treatment
3. DNA origami immobilization
  1. Synthesis
  2. Deposition
ROUGHNESS MEASUREMENT
RESULTS AND DISCUSSION
SUMMARY AND CONCLUSIONS

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KEYWORDS and PACS

Keywords

DNA, electron beam effects, optimisation, plasma materials processing, surface roughness, surface treatment

PACS

81.05.Fb

Organic semiconductors
52.77.-j

Plasma applications
61.80.Fe

Electron and positron radiation effects
61.82.Pv

Polymers, organic compounds
81.65.-b

Surface treatments
68.35.bm

Polymers, organics

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History

Received 11 August 2011
Accepted 17 December 2011
Published online 12 January 2012

Digital Object Identifier

http://dx.doi.org/10.1116/1.3676054

PUBLICATION DATA

ISSN

1071-1023 (print)

1520-8567 (online)

Publisher

American Vacuum Society

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