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Jan 2012

Volume 30, Issue 1, Articles (01xxxx)

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J. Vac. Sci. Technol. B 30, 010801 (2012); http://dx.doi.org/10.1116/1.3661355 (28 pages)

Jarrett J. Dumond and Hong Yee Low
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Multi-phase model for reflection anisotropy spectra of copper phthalocyanine films on anisotropic silicon substrates

Falko Seidel, Li Ding, Ovidiu D. Gordan, and Dietrich R. T. Zahn

J. Vac. Sci. Technol. B 30, 012401 (2012); http://dx.doi.org/10.1116/1.3677823 (6 pages)

Online Publication Date: 23 January 2012

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Reflection anisotropy spectroscopy (RAS) and spectroscopic ellipsometry (SE) have extensively been applied to inorganic and organic structures and, because of the similarity of these two techniques, the evaluation procedure of RA spectra can be performed in a similar way as for SE. Especially for thin films, RA spectra are often strongly enhanced in the spectral region where optical interference occurs and the superposition of interference features can lead to an incorrect interpretation of RA spectra. By simulation of the origin of each RAS feature it is possible to distinguish interference from true film anisotropy. Also, the effect of surface roughness on the RA spectra is discussed.
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78.66.Qn Polymers; organic compounds
68.35.bg Semiconductors
78.20.Ci Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)
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