Probing temporal evolution of extreme ultraviolet assisted contamination on Ru mirror by x-ray photoelectron spectroscopy

Al-Ajlony, A.; Kanjilal, A.; Catalfano, M.; Fields, M.; Harilal, S. S.; Hassanein, A.; Rice, B.

doi:doi:10.1116/1.3680122

Volume/Page
Keyword
DOI
Citation
Advanced

Volume: Page/Article:

Search Content Type

article doi:

Citation:

You are not logged in to this journal. Log In

Journal of Vacuum Science & Technology B / Volume 30 / Issue 2 / Lithography

Previous Article | Next Article

J. Vac. Sci. Technol. B 30, 021601 (2012); http://dx.doi.org/10.1116/1.3680122 (6 pages)

Probing temporal evolution of extreme ultraviolet assisted contamination on Ru mirror by x-ray photoelectron spectroscopy

A. Al-Ajlony¹, A. Kanjilal¹, M. Catalfano¹, M. Fields¹, S. S. Harilal¹, A. Hassanein¹, and B. Rice²

¹Center for Materials Under Extreme Environment, School of Nuclear Engineering, Purdue University, West Lafayette, Indiana 47907
²SEMATECH Inc., Albany, New York 12203

View Map

(Published online 1 February 2012)

Abstract

References (23)

Citing Articles (1)

Article Objects (10)

Alerts
- Alert Me When Cited
- Alert Me When Corrected
Tools
Share
- Email Abstract
- Connotea
- CiteULike
- del.icio.us
- BibSonomy
- Tweet this Article
- Add to Facebook

Full Text: Read Online (HTML) | Download PDF | Rent Article | Buy PDF (US$28) | View Cart

Extreme ultraviolet (EUV) radiation mediated carbon contamination and oxidation of the Ru mirror surface, and the corresponding impact on reflectivity were studied. In particular, time-dependent systematic decrease in EUV reflectivity with a 13.5 nm wavelength of light in high vacuum atmosphere was recorded and correlated with the change in chemical composition on the Ru surface as derived from in situ x-ray photoelectron spectroscopy (XPS). The contamination on Ru surface is caused by residual impurities of the test chamber. The recorded XPS spectra show a sudden increase in carbon concentration in the first 1 h followed by a slow but linear growth in the presence of EUV radiation. Further analyses show a slight increase in Ru oxide, whereas the concentration of water molecules decreases continuously. Moreover, the carbon monoxide level at the surface was stabilized after initial increase in concentration for an hour. The impact of water molecules and the accumulation of carbon atoms on the Ru surface are discussed in details.

ACKNOWLEDGMENTS

This work is partially supported by College of Engineering, Purdue University, and SEMATECH, Inc.

Article Outline

INTRODUCTION
EXPERIMENTAL DETAILS
RESULTS AND DISCUSSION
CONCLUSIONS

View more related articles.

KEYWORDS and PACS

Keywords

chemical analysis, mirrors, oxidation, reflectivity, surface contamination, ultraviolet radiation effects, X-ray photoelectron spectra

PACS

81.65.Mq

Oxidation
68.35.Dv

Composition, segregation; defects and impurities
79.60.-i

Photoemission and photoelectron spectra
82.80.Pv

Electron spectroscopy (X-ray photoelectron (XPS), Auger electron spectroscopy (AES), etc.)
61.05.js

X-ray photoelectron diffraction
61.80.Ba

Ultraviolet, visible, and infrared radiation effects (including laser radiation)

RELATED DATABASES

To view database links for this article, you need to log in.

History

Received 7 October 2011
Accepted 4 January 2012
Published online 1 February 2012

Digital Object Identifier

http://dx.doi.org/10.1116/1.3680122

PUBLICATION DATA

ISSN

1071-1023 (print)

1520-8567 (online)

Publisher

American Vacuum Society

For access to fully linked references, you need to log in.

For access to citing articles, you need to log in.

Figures (10)

Access to article objects (figures, tables, multimedia) requires a subscription; log in to view available files.
(Access to supplementary files, where available, is free for this journal.)