Planar-localized surface plasmon resonance device by block-copolymer and nanoimprint lithography fabrication methods

Peter Yang, C. Y.; Yang, Elaine L.; Steinhaus, Chip A.; Liu, Chi-Chun; Nealey, Paul F.; Skinner, Jack L.

doi:doi:10.1116/1.3683475

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Journal of Vacuum Science & Technology B / Volume 30 / Issue 2 / Plasmonics

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J. Vac. Sci. Technol. B 30, 026801 (2012); http://dx.doi.org/10.1116/1.3683475 (6 pages)

Planar-localized surface plasmon resonance device by block-copolymer and nanoimprint lithography fabrication methods

C. Y. Peter Yang¹, Elaine L. Yang¹, Chip A. Steinhaus¹, Chi-Chun Liu², Paul F. Nealey², and Jack L. Skinner¹

¹Sandia National Laboratories, Livermore, California 94550
²Department of Chemical and Biological Engineering, University of Wisconsin, Madison, Wisconsin 53706

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(Published online 8 February 2012)

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The authors report on the integration of delocalized surface plasmon resonances (SPRs) and localized surface plasmon resonances (LSPRs) on a single device. The submicron SPR device was fabricated with nanoimprint lithography (NIL). Gold nanoparticles for LSPR generation were created and deposited via three methods and analyzed with rhodamine 6 G and surface-enhanced Raman spectroscopy (SERS). Compared to drop-cast and thin film annealing methods, gold nanoparticles fabricated from a diblock-copolymer NIL template produced the most significant effect on the charge-transfer component of the SERS enhancement mechanism due to near-field interactions at the 10 nm inter-particle separation region. The authors also report a 26% enhancement of optical resonance with an integrated SPR-LSPR plasmonic device consisting of a two-dimensional submicron aluminum grating fully coupled with gold nanoparticles measuring 20.4 nm in diameter in a water medium. If the 2D aluminum grating were coupled to an optimized nanoparticle SERS device fabricated from a DBCP NIL template, the coupled nanoparticle-grating device could exhibit an even higher enhancement and optical resonance performance.

ACKNOWLEDGMENTS

A portion of this work was supported by the Laboratory Directed Research and Development program at Sandia National Laboratories. Sandia is a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company, for the United States Department of Energy’s National Nuclear Security Administration under Contract No. DE-AC04-94AL85000.

Article Outline

INTRODUCTION
DEVICE THEORY
FABRICATION
EXPERIMENTAL METHODS AND RESULTS
1. Raman measurements
2. Reflectivity measurements
CONCLUSIONS

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KEYWORDS and PACS

Keywords

gold, nanolithography, nanoparticles, polymer blends, soft lithography, surface enhanced Raman scattering, surface plasmon resonance

PACS

81.16.Nd

Micro- and nanolithography
85.40.Hp

Lithography, masks and pattern transfer

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History

Received 28 June 2011
Accepted 22 January 2012
Published online 8 February 2012

Digital Object Identifier

http://dx.doi.org/10.1116/1.3683475

PUBLICATION DATA

ISSN

1071-1023 (print)

1520-8567 (online)

Publisher

American Vacuum Society

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