AES spectra have been obtained from metals in the first row of transition elements using a Perkin Elmer PHI Model 660 scanning Auger electron microprobe. The goal was to obtain spectra which represented what would normally be obtained under typical operating conditions. Auger spectra were taken from Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, and Ge samples under identical conditions. Each elemental spectrum was obtained using electron beam energies of 3, 5, 10, and 20 keV and 50 nA beam currents. Data from the LMM peak from a Cu sample was used to calculate the signal‐to‐noise ratio and to check instrumental calibration. The signal‐to‐noise ratio before and after analysis was the same and equal to 25, 48, 45, and 45 for 3, 5, 10, and 20 keV beams, respectively. The instrumental resolution used for all spectra was 0.6%.