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Dec 2002

Volume 9, Issue 1, pp. 1-285

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Characterization of SiLK I™ Semiconductor Dielectric by XPS

David D. Hawn

Surf. Sci. Spectra 9, 1 (2002); http://dx.doi.org/10.1116/11.20020306 (5 pages) | Cited 2 times

Online Publication Date: 31 March 2003

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This work reports survey, core level, and valence band x-ray photoelectron spectra obtained from the surface of a spin-on low-K semiconductor dielectric material, SiLK™. SiLK™ semiconductor dielectric is a highly crosslinked polyphenylene produced by thermal cure of a low molecular weight aromatic thermosetting polymer. Spectra were acquired from the material applied to a silicon wafer substrate at 0.60 μm thickness. The spectra were acquired with a Kratos AXIS 165 x-ray photoelectron spectrometer, using monochromatic Al Kα x radiation. Survey spectra were obtained at 80 eV pass energy (constant analyzer resolution), and O 1s and C 1s region spectra were obtained at 20 eV pass energy. The valence band was also obtained at 40 eV pass energy. SiLK is a registered Tradename of The Dow Chemical Company. © 2003 American Vacuum Society.
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79.60.Fr Polymers; organic compounds
71.20.Rv Polymers and organic compounds

Poly(Desaminotyrosyl-tyrosine Carbonate Ethyl Ester) Studied by XPS

Victor H. Perez-Luna, Joachim Kohn, Daniel J. Graham, and Buddy D. Ratner

Surf. Sci. Spectra 9, 6 (2002); http://dx.doi.org/10.1116/11.20020201 (6 pages)

Online Publication Date: 8 April 2003

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Pseudo-poly(amino acids) are synthetic biodegradable polymers made from natural metabolites. The use of natural metabolites for the synthesis of biomedical materials originated from the concern about the possible toxicity of the degradation products of biodegradable materials. Here we present the surface characterization of poly(desaminotyrosyl-tyrosine carbonate ethyl ester), a polymer made from tyrosine (an amino acid) and desaminotyrosine (a natural metabolite occurring in plants). X-ray photoemission spectra of poly(desamino-tyrosyl-tyrosine carbonate ethyl ester) are presented. Low resolution spectra (survey scan), and high resolution spectra (C ls, N 1s, and O ls regions) were collected with a Surface Science Instruments SSX-lOO spectrometer. The composition of this polymer by XPS was in good agreement with the stoichiometry of its repeating unit. This can be seen by examining the experimental O/C and N/C ratios, 0.274 and 0.054, respectively, with the expected values of 0.286 and 0.048. This agreement is also seen from the high resolution C 1s peak fit when comparing the stoichiometric ratios (excluding the shake-up satellite) of mathHx:math�O/math�N:O�math�O�C:(O)2�math�O(14:4:1:1:1) with the experimental values of 14:4.03:0.84:0.71:0.82. © 2003 American Vacuum Society.
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79.60.Fr Polymers; organic compounds
82.80.Pv Electron spectroscopy (X-ray photoelectron (XPS), Auger electron spectroscopy (AES), etc.)
87.85.J- Biomaterials

A Study of Solid CO2/NH3 and NH3/H2O by XPS

T. R. Dillingham and D. M. Cornelison

Surf. Sci. Spectra 9, 12 (2002); http://dx.doi.org/10.1116/11.20021001 (9 pages)

Online Publication Date: 1 May 2003

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The investigation of the chemical properties of ices and ice mixtures (the term “ice” as used in this context refers to the solid phase of materials typically thought of as either gases or liquids) have become increasingly important in the areas of atmospheric science, planetary astronomy, and astrophysics. In this study, high quality CO2/NH3 and NH3/H2O films have been grown on a stainless steel cold finger using a continuous flow liquid nitrogen system. The solid (or ice) samples were formed using research grade NH3 and isotopic 13CO2 gases, and ultrapure water. The isotopic gas was used to distinguish it from any background CO2 in the vacuum chamber. The gases were mixed in a stainless steel prechamber with the pressure monitored using an MKS capacitance manometer. The base pressure in the chamber was less than 5 × 10−10 T prior to deposition and upon gas introduction was increased, using a precision leak valve, to approximately 2 × 10−8 T. Films were grown at this pressure for approximately 30 min. Gas purity was monitored using a Balzers Prisma QMS 300 quadrupole mass spectrometer. The nucleated films were characterized using x-ray photoelectron spectroscopy (XPS). The reported spectra include survey and high resolution scans of the major photoelectron peaks. © 2003 American Vacuum Society.
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82.80.Pv Electron spectroscopy (X-ray photoelectron (XPS), Auger electron spectroscopy (AES), etc.)
68.55.-a Thin film structure and morphology
79.60.Dp Adsorbed layers and thin films

A Mineral TiO2(001) Anatase Crystal Examined by XPS

Geert Silversmit, Geert De Doncker, and Roger De Gryse

Surf. Sci. Spectra 9, 21 (2002); http://dx.doi.org/10.1116/11.20020701 (9 pages) | Cited 5 times

Online Publication Date: 22 May 2003

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X-ray photoelectron spectroscopy measurements with Al Kα radiation of the Ti 2p, Ti 3p, O 1s, and O 2s core levels of a mineral anatase TiO2(001) crystal are presented. The weak Ti 3p and O 2s photopeaks were measured with two resolutions. The valence band is also presented. © 2003 American Vacuum Society.
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79.60.Bm Clean metal, semiconductor, and insulator surfaces
82.80.Pv Electron spectroscopy (X-ray photoelectron (XPS), Auger electron spectroscopy (AES), etc.)
91.30.Bi Seismic sources (mechanisms, magnitude, moment frequency spectrum)

As2S3 Surface Chemistry Changes Under Ion Sputtering by XPS

Sudipta Seal, Kathleen Richardson, Wenyan Li, and Kirk Scammon

Surf. Sci. Spectra 9, 30 (2002); http://dx.doi.org/10.1116/11.20020803 (9 pages)

Online Publication Date: 4 June 2003

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This paper reports our results on XPS studies of the chemical variation of As2S3 glass due to the effect of ion sputtering. The principal core levels are studied by XPS before and after exposure to an Ar+ ion beam. © 2003 American Vacuum Society.
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82.80.Pv Electron spectroscopy (X-ray photoelectron (XPS), Auger electron spectroscopy (AES), etc.)
82.65.+r Surface and interface chemistry; heterogeneous catalysis at surfaces
79.20.Rf Atomic, molecular, and ion beam impact and interactions with surfaces

Study of Sr2FeMoO6 PLD Films by In situ XPS

José Santiso, Jordi Fraxedas, and Albert Figueras

Surf. Sci. Spectra 9, 39 (2002); http://dx.doi.org/10.1116/11.20020403 (7 pages)

Online Publication Date: 12 June 2003

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A series of Sr2FeMoO6 epitaxial films were prepared by pulsed laser deposition (PLD) at different oxygen pressures. Films prepared at 950 °C substrate temperature and 10−5 mbar oxygen pressure on SrTiO3(100) substrates have shown maximum Fe/Mo order and high saturation magnetization of about 3 Bohr magnetons (at 10 K). However, they show low Curie temperatures Tc of about 200 K, in comparison to the expected 430 K attained for bulk ceramic samples. The reason for those depleted Tc values is believed to be related to the Fe and Mo oxidation state, therefore core-level XPS spectra were recorded in situ for the as-deposited films immediately after deposition and without exposure to atmosphere. Those are, to our knowledge, the first reported in situ XPS spectra on SFMO films. These studies have also shown the presence of different secondary phases of extreme importance for the understanding of their physical properties. © 2003 American Vacuum Society.
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79.60.Dp Adsorbed layers and thin films
81.05.Je Ceramics and refractories (including borides, carbides, hydrides, nitrides, oxides, and silicides)
71.20.Ps Other inorganic compounds

Nanostructured Cadmium Sulfide Thin Films by XPS

Davide Barreca, Alberto Gasparotto, Cinzia Maragno, and Eugenio Tondello

Surf. Sci. Spectra 9, 46 (2002); http://dx.doi.org/10.1116/11.20030116 (8 pages) | Cited 2 times

Online Publication Date: 15 August 2003

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Nanostructured cadmium sulfide thin films were deposited on SiO2 by a cold-wall low-pressure CVD reaction system starting from the single-source precursor Cd(O-iPrXan)2 [O-iPrXan = S2COCH(CH3)2]. Deposition experiments were carried out in an inert nitrogen atmosphere in optimized pressure/gas flow conditions. The obtained films were analyzed by x-ray diffraction (XRD), x-ray photoelectron spectroscopy (XPS), and atomic force microscopy (AFM) for a detailed determination of their microstructure, chemical composition, and surface morphology, while UV-Vis measurements were carried out in order to investigate their optical properties. Irrespective of the preparative conditions, all the films displayed the typical absorption spectrum of CdS, with an energy gap value Eg ≈2.5 eV. AFM analyses showed that flat, uniform, and crack-free layers were obtained under all the adopted synthetic conditions. This result is of interest in view of potential applications in optoelectronic devices like solar cells, where a smooth and regular morphology is required. In this work, XPS analyses of a representative CdS thin film deposited at 400 °C are presented. Besides the wide scan spectrum, charge corrected binding energies for the Cd 3d5/2, Cd 3d3/2, Cd MNN, S 2p3/2, S 2p1/2, O 1s, and C 1s surface photoelectron signals are reported and discussed. © 2003 American Vacuum Society.
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79.60.Dp Adsorbed layers and thin films
81.07.Bc Nanocrystalline materials
81.05.Dz II-VI semiconductors
68.37.Ps Atomic force microscopy (AFM)

Analysis of Nanocrystalline ZnS Thin Films by XPS

Davide Barreca, Alberto Gasparotto, Cinzia Maragno, Eugenio Tondello, and Trevor R. Spalding

Surf. Sci. Spectra 9, 54 (2002); http://dx.doi.org/10.1116/11.20030117 (8 pages) | Cited 3 times

Online Publication Date: 15 August 2003

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Nanocrystalline ZnS thin films were synthesized by chemical vapor deposition (CVD) using Zn(O-iPrXan)2 [O-iPrXan =S2COCH(CH3)2] as a single-source precursor compound. The coatings were deposited on silica substrates in N2 atmosphere at temperatures between 200 and 450 °C and subsequently characterized by glancing-incidence x-ray diffraction (GIXRD), secondary ion mass spectrometry (SIMS), atomic force microscopy (AFM), UV-Vis absorption spectroscopy, x-ray photoelectron (XPS), and x-ray excited auger electron (XE-AES) spectroscopies. This work is dedicated to the XPS and XE-AES characterization of a representative zinc sulfide thin film. Besides the wide scan spectrum, detailed spectra for the Zn 2p3/2, Zn 3p, Zn LMM, S 2p,O 1 s, and C 1s regions and related data are presented and discussed. Both the S/Zn atomic ratio and the evaluation of the Auger parameter point out to the formation of stoichiometric zinc sulfide. Moreover, oxygen and carbon contamination were merely limited to the outermost sample layers. © 2003 American Vacuum Society.
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79.60.Dp Adsorbed layers and thin films
81.07.Bc Nanocrystalline materials
81.05.Dz II-VI semiconductors
68.37.Ps Atomic force microscopy (AFM)

Effects of Peroxide Plasma Cleaning on Engineering Materials Designated for Adhesion Experiments on the Surface of Mars

Michael H. Hecht and Jason Feldman

Surf. Sci. Spectra 9, 174 (2002); http://dx.doi.org/10.1116/11.20011111 (32 pages)

Online Publication Date: 29 December 2003

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Samples of four materials (Herculite 80, SSM 3084, FRAS 140, and Teflon), designated for a soil analysis instrument designed for a Mars Surveyor Program lander, were exposed to a peroxide plasma and immediately sealed in sterile bags. The purpose of this surface analysis was to evaluate the effect of cleaning procedures mandated for biological sterilization, in accordance with international treaties. Comparison of XPS measurements was made with as-received samples. Herculite is a plastic-coated weave, SSM 3084 is a sandwich of two polymers and a silver film, and FRAS 140 is a flexible, transparent polymer film. © 2003 American Vacuum Society.
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82.80.Pv Electron spectroscopy (X-ray photoelectron (XPS), Auger electron spectroscopy (AES), etc.)
81.05.Lg Polymers and plastics; rubber; synthetic and natural fibers; organometallic and organic materials
96.30.Gc Mars
81.65.Cf Surface cleaning, etching, patterning

Engineering Polymers for Triboelectricity Experiments on the Surface of Mars

Michael H. Hecht and Martin Buehler

Surf. Sci. Spectra 9, 206 (2002); http://dx.doi.org/10.1116/11.20011112 (21 pages)

Online Publication Date: 29 December 2003

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The surfaces of five test materials—Rulon J, G10, Teflon, Lexan, and Lucite—designated for a soil analysis instrument developed for a Mars Surveyor Program lander, are here examined with XPS as part of their archival characterization. Under the x-ray beam, all five materials displayed charging consistent with their bulk resistivities except for Rulon J, a filled Teflon (the filler appears to also be Teflon, but of a different resistivity). Under the microscope, Rulon-J appeared as particles embedded in a matrix, each covering approximately 50% of the surface. While both materials appeared to have the same chemical composition, their conductivity was mismatched, and the resulting spectra had sets of peaks of comparable heights, but separated by nearly 8 eV. The charging conditions selected (4 eV flood gun) minimized the distortion of the high binding energy peaks, which appeared at nominal energies for the respective transitions. All materials show some evidence of contamination. The presence of a silicon peak in the Lexan sample suggested contamination with silicone, while the Teflon and possibly the Lucite appear to have hydrocarbon contamination. © 2003 American Vacuum Society.
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82.80.Pv Electron spectroscopy (X-ray photoelectron (XPS), Auger electron spectroscopy (AES), etc.)
96.30.Gc Mars
81.05.Lg Polymers and plastics; rubber; synthetic and natural fibers; organometallic and organic materials

Mature Dental Enamel [Calcium Hydroxyapatite, Ca10(PO4)6(OH)2] by XPS

Alan E. Nelson, Nadja K. S. Hildebrand, and Paul W. Major

Surf. Sci. Spectra 9, 250 (2002); http://dx.doi.org/10.1116/11.20030701 (10 pages)

Online Publication Date: 8 March 2004

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The dental enamel from the buccal surface of a human premolar tooth (maxilla) was analyzed by x-ray photoelectron spectroscopy (XPS). Mature dental enamel has a crystalline structure containing up to 96 wt% inorganic material, and is principally comprised of calcium hydroxyapatite [Ca10(PO4)6(OH)2, HAP]. The XPS analysis was performed with a Kratos Analytical Axis 165 spectrometer using a monochromatic Al Kα source. In addition to a survey spectrum, core level spectra of the Ca 2p, O 1s, P 2p, and C 1s orbitals were collected. The data are consistent with the surface being predominately calcium hydroxyapatite, with trace contaminants (Na, Si, N, S) observed. © 2004 American Vacuum Society.
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82.80.Pv Electron spectroscopy (X-ray photoelectron (XPS), Auger electron spectroscopy (AES), etc.)
87.64.ks Electron and photoelectron

Alkyl Monolayers on Silica Surfaces Prepared from Neat, Heated (Tridecafluoro-1,1,2,2-tetrahydrooctyl)-1-dimethylchlorosilane Analyzed by XPS

Ghaleb A. Husseini, Eric T. Sevy, Matthew C. Asplund, Justin Peacock, and Matthew R. Linford

Surf. Sci. Spectra 9, 260 (2002); http://dx.doi.org/10.1116/11.20020802 (6 pages)

Online Publication Date: 12 March 2004

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Silane monolayers on silica, prepared from mono-, di-, and trichlorosilanes, are widely used in industry for surface functionalization and modification. However, unlike di- and trichlorosilanes, monochlorosilanes are particularly easy to work with because they can dimerize, but not polymerize, upon reaction with water. Typically, an organic solvent is used when depositing a silane monolayer. Here we show XPS spectra of monolayers of (Tridecafluoro-1,1,2,2-tetrahydrooctyl)-1-dimethylchlorosilane on silicon oxide (silicon wafer) prepared using a rapid, solvent-free approach. Reaction conditions are 60 °C for 10 min using the neat (pure) compound, and no inert atmosphere or special treatment of the compound is required. © 2004 American Vacuum Society.
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82.80.Pv Electron spectroscopy (X-ray photoelectron (XPS), Auger electron spectroscopy (AES), etc.)
81.05.Lg Polymers and plastics; rubber; synthetic and natural fibers; organometallic and organic materials

Enargite by XPS

Marzia Fantauzzi, Davide Atzei, Stefania Da Pelo, Bernhard Elsener, Franco Frau, Piero Franco Lattanzi, and Antonella Rossi

Surf. Sci. Spectra 9, 266 (2002); http://dx.doi.org/10.1116/11.20030801 (9 pages)

Online Publication Date: 12 March 2004

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X-ray photoelectron spectroscopy was used for characterizing the enargite surface. Freshly cleaved samples were analyzed at liquid nitrogen temperature. Enargite is a copper arsenic sulfide of formula Cu3AsS4; it is used as a minor ore of copper. Enargite is a potential source of arsenic and may create environmental problems through the release of toxic elements upon oxidation. © 2004 American Vacuum Society.
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82.80.Pv Electron spectroscopy (X-ray photoelectron (XPS), Auger electron spectroscopy (AES), etc.)
91.60.-x Physical properties of rocks and minerals

Fe10Cr and Fe15Cr as Standards for Stainless Steel Surface Characterization, by XPS

Danilo Addari, Davide Atzei, Bernhard Elsener, and Antonella Rossi

Surf. Sci. Spectra 9, 275 (2002); http://dx.doi.org/10.1116/11.20030802 (11 pages)

Online Publication Date: 12 March 2004

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X-ray photoelectron spectroscopy is used to characterize thin oxide/hydroxide films present on the surface of stainless steels after mechanical polishing and electrochemical polarization. In this work the XPS spectra of Fe10Cr and Fe15Cr were collected after mechanical polishing and sputtering in order to determine the fitting parameters of the two major alloy elements, i.e., iron and chromium. © 2004 American Vacuum Society.
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82.80.Pv Electron spectroscopy (X-ray photoelectron (XPS), Auger electron spectroscopy (AES), etc.)
81.05.Bx Metals, semimetals, and alloys
81.65.Ps Polishing, grinding, surface finishing
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